Teng-Chao Tao

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Saugus, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
System and method for in-situ beamline film stabilization or remova...
- Patent number 10,580,616
- Issue date Mar 3, 2020
- Axcelis Technologies, Inc.
- Teng-Chao David Tao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas bearing electrostatic chuck
- Patent number 9,036,326
- Issue date May 19, 2015
- Axcelis Technologies, Inc.
- William David Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Annulus clamping and backside gas cooled electrostatic chuck
- Patent number 8,422,193
- Issue date Apr 16, 2013
- Axcelis Technologies, Inc.
- Teng Chao D. Tao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition reduction system for an ion implanter
- Patent number 7,629,597
- Issue date Dec 8, 2009
- Axcelis Technologies, Inc.
- Teng-Chao Tao
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND METHOD FOR IN-SITU BEAMLINE FILM STABILIZATION OR REMOVA...
- Publication number 20190108972
- Publication date Apr 11, 2019
- Axcelis Technologies, Inc.
- Teng-Chao David Tao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS BEARING ELECTROSTATIC CHUCK
- Publication number 20090273878
- Publication date Nov 5, 2009
- Axcelis Technologies, Inc.
- William David Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Annulus clamping and backside gas cooled electrostatic chuck
- Publication number 20080144251
- Publication date Jun 19, 2008
- Axcelis Technologies, Inc.
- Teng Chao D. Tao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Deposition reduction system for an ion implanter
- Publication number 20080073576
- Publication date Mar 27, 2008
- Axcelis Technologies Inc.
- Teng-Chao Tao
- H01 - BASIC ELECTRIC ELEMENTS