Teng-fang KUO

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Chamber component with protective ceramic coating containing yttriu...
- Patent number 11,769,683
- Issue date Sep 26, 2023
- Applied Materials, Inc.
- Wendell Glenn Boyd
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support assembly with deposited surface features
- Patent number 11,476,146
- Issue date Oct 18, 2022
- Applied Materials, Inc.
- Wendell Glenn Boyd
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning method
- Patent number 11,087,979
- Issue date Aug 10, 2021
- Applied Materials, Inc.
- Christopher S. Olsen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning method
- Patent number 10,861,693
- Issue date Dec 8, 2020
- Applied Materials, Inc.
- Peter Stone
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support assembly with deposited surface features
- Patent number 10,679,885
- Issue date Jun 9, 2020
- Applied Materials, Inc.
- Wendell Glenn Boyd
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Cleaning method
- Patent number 10,199,221
- Issue date Feb 5, 2019
- Applied Materials, Inc.
- Christopher S. Olsen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support assembly with deposited surface features
- Patent number 10,020,218
- Issue date Jul 10, 2018
- Applied Materials, Inc.
- Wendell Glenn Boyd
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Device conformity control by low temperature, low pressure, inducti...
- Patent number 10,008,388
- Issue date Jun 26, 2018
- Applied Materials, Inc.
- Ping Han Hsieh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning method
- Patent number 9,870,921
- Issue date Jan 16, 2018
- Applied Materials, Inc.
- Christopher S. Olsen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for removing contamination from surfaces in substrate proce...
- Patent number 9,805,914
- Issue date Oct 31, 2017
- Applied Materials, Inc.
- Chun Yan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
CVD oxide surface pre-conditioning by inductively coupled O2 plasma
- Patent number 9,240,315
- Issue date Jan 19, 2016
- Applied Materials, Inc.
- Ping Han Hsieh
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CHAMBER COMPONENT WITH PROTECTIVE CERAMIC COATING CONTAINING YTTRIU...
- Publication number 20220254672
- Publication date Aug 11, 2022
- Applied Materials, Inc.
- Wendell Glenn Boyd
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE SUPPORT ASSEMBLY WITH DEPOSITED SURFACE FEATURES
- Publication number 20200243368
- Publication date Jul 30, 2020
- Applied Materials, Inc.
- Wendell Glenn Boyd
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING METHOD
- Publication number 20190172712
- Publication date Jun 6, 2019
- Applied Materials, Inc.
- Christopher S. OLSEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT ASSEMBLY WITH DEPOSITED SURFACE FEATURES
- Publication number 20180301364
- Publication date Oct 18, 2018
- Wendell Glenn Boyd
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING METHOD
- Publication number 20180138038
- Publication date May 17, 2018
- Applied Materials, Inc.
- Christopher S. OLSEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE CONFORMITY CONTROL BY LOW TEMPERATURE, LOW PRESSURE, INDUCTI...
- Publication number 20170301556
- Publication date Oct 19, 2017
- Applied Materials, Inc.
- Ping Han HSIEH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING METHOD
- Publication number 20170178894
- Publication date Jun 22, 2017
- Applied Materials, Inc.
- Peter STONE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT ASSEMBLY WITH DEPOSITED SURFACE FEATURES
- Publication number 20170140970
- Publication date May 18, 2017
- Applied Materials, Inc.
- Wendell Glenn Boyd
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
CLEANING METHOD
- Publication number 20170084456
- Publication date Mar 23, 2017
- Applied Materials, Inc.
- Christopher S. OLSEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR REMOVING CONTAMINATION FROM SURFACES IN SUBSTRATE PROCE...
- Publication number 20160293384
- Publication date Oct 6, 2016
- Applied Materials, Inc.
- Chun YAN
- H01 - BASIC ELECTRIC ELEMENTS

Teng-fang KUO

Person

Patents Grantslast 30 patents

Chamber component with protective ceramic coating containing yttriu...

Substrate support assembly with deposited surface features

Cleaning method

Cleaning method

Substrate support assembly with deposited surface features

Cleaning method

Substrate support assembly with deposited surface features

Device conformity control by low temperature, low pressure, inducti...

Cleaning method

Methods for removing contamination from surfaces in substrate proce...

CVD oxide surface pre-conditioning by inductively coupled O2 plasma

Patents Applicationslast 30 patents

CHAMBER COMPONENT WITH PROTECTIVE CERAMIC COATING CONTAINING YTTRIU...

SUBSTRATE SUPPORT ASSEMBLY WITH DEPOSITED SURFACE FEATURES

CLEANING METHOD

SUBSTRATE SUPPORT ASSEMBLY WITH DEPOSITED SURFACE FEATURES

CLEANING METHOD

DEVICE CONFORMITY CONTROL BY LOW TEMPERATURE, LOW PRESSURE, INDUCTI...

CLEANING METHOD

SUBSTRATE SUPPORT ASSEMBLY WITH DEPOSITED SURFACE FEATURES

CLEANING METHOD

METHODS FOR REMOVING CONTAMINATION FROM SURFACES IN SUBSTRATE PROCE...