Tensei SATO

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor manufacturing apparatus, failure prediction method fo...
- Patent number 12,191,178
- Issue date Jan 7, 2025
- Ebara Corporation
- Jumpei Fujikata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Short circuit detection method in plating apparatus, control method...
- Patent number 11,866,842
- Issue date Jan 9, 2024
- Ebara Corporation
- Hideki Wakabayashi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Substrate processing system, controller and method using test opera...
- Patent number 11,661,669
- Issue date May 30, 2023
- Ebara Corporation
- Kazuma Ideguchi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Semiconductor manufacturing apparatus, failure prediction method fo...
- Patent number 11,315,812
- Issue date Apr 26, 2022
- Ebara Corporation
- Jumpei Fujikata
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR OPERATING SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20250225022
- Publication date Jul 10, 2025
- EBARA CORPORATION
- Yosuke NAGASAWA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR DETERMINING HEALTH INDEX OF SUBSTRATE PROCESSING APPARAT...
- Publication number 20250183100
- Publication date Jun 5, 2025
- EBARA CORPORATION
- Shaunak GHATPANDE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF DETECTING LEAKAGE
- Publication number 20240192075
- Publication date Jun 13, 2024
- EBARA CORPORATION
- Yosuke NAGASAWA
- G01 - MEASURING TESTING
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20240145277
- Publication date May 2, 2024
- EBARA CORPORATION
- Yosuke NAGASAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLATING APPARATUS, CONTROL METHOD FOR PLATING APPARATUS AND NONVOLA...
- Publication number 20230203702
- Publication date Jun 29, 2023
- EBARA CORPORATION
- Yosuke NAGASAWA
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
PLATING APPARATUS AND PLATING METHOD
- Publication number 20230203701
- Publication date Jun 29, 2023
- EBARA CORPORATION
- Ryuya KOIZUMI
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SHORT CIRCUIT DETECTION METHOD IN PLATING APPARATUS, CONTROL METHOD...
- Publication number 20220228286
- Publication date Jul 21, 2022
- EBARA CORPORATION
- Hideki Wakabayashi
- G01 - MEASURING TESTING
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS, FAILURE PREDICTION METHOD FO...
- Publication number 20220181180
- Publication date Jun 9, 2022
- EBARA CORPORATION
- Jumpei FUJIKATA
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, CONTROLLER FOR SUBSTRATE PROCESSING SY...
- Publication number 20220033989
- Publication date Feb 3, 2022
- EBARA CORPORATION
- Kazuma Ideguchi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS, FAILURE PREDICTION METHOD FO...
- Publication number 20180294174
- Publication date Oct 11, 2018
- EBARA CORPORATION
- Jumpei FUJIKATA
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Tensei SATO

Person

Patents Grantslast 30 patents

Semiconductor manufacturing apparatus, failure prediction method fo...

Short circuit detection method in plating apparatus, control method...

Substrate processing system, controller and method using test opera...

Semiconductor manufacturing apparatus, failure prediction method fo...

Patents Applicationslast 30 patents

METHOD FOR OPERATING SEMICONDUCTOR MANUFACTURING APPARATUS

METHOD FOR DETERMINING HEALTH INDEX OF SUBSTRATE PROCESSING APPARAT...

METHOD OF DETECTING LEAKAGE

SEMICONDUCTOR MANUFACTURING APPARATUS

PLATING APPARATUS, CONTROL METHOD FOR PLATING APPARATUS AND NONVOLA...

PLATING APPARATUS AND PLATING METHOD

SHORT CIRCUIT DETECTION METHOD IN PLATING APPARATUS, CONTROL METHOD...

SEMICONDUCTOR MANUFACTURING APPARATUS, FAILURE PREDICTION METHOD FO...

SUBSTRATE PROCESSING SYSTEM, CONTROLLER FOR SUBSTRATE PROCESSING SY...

SEMICONDUCTOR MANUFACTURING APPARATUS, FAILURE PREDICTION METHOD FO...