Teppei Takahashi

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Koshi City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate treatment method and substrate treatment apparatus
- Patent number 11,571,709
- Issue date Feb 7, 2023
- Tokyo Electron Limited
- Teppei Takahashi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus, substrate processing method, and co...
- Patent number 11,036,138
- Issue date Jun 15, 2021
- Tokyo Electron Limited
- Teppei Takahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating method, coating apparatus and recording medium
- Patent number 10,926,288
- Issue date Feb 23, 2021
- Tokyo Electron Limited
- Teppei Takahashi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS
- Publication number 20200338589
- Publication date Oct 29, 2020
- TOKYO ELECTRON LIMITED
- Teppei Takahashi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND CO...
- Publication number 20190146345
- Publication date May 16, 2019
- TOKYO ELECTRON LIMITED
- Teppei TAKAHASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING METHOD, COATING APPARATUS AND RECORDING MEDIUM
- Publication number 20180369856
- Publication date Dec 27, 2018
- TOKYO ELECTRON LIMITED
- Teppei Takahashi
- H01 - BASIC ELECTRIC ELEMENTS