Terada Kazuo

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Supercritical processing apparatus, substrate processing system and...
- Patent number 9,076,643
- Issue date Jul 7, 2015
- Tokyo Electron Limited
- Takayuki Toshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating device, coating and developing system, heating method and s...
- Patent number 8,933,376
- Issue date Jan 13, 2015
- Tokyo Electron Limited
- Tetsuo Fukuoka
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Substrate carrying apparatus having circumferential sidewall and su...
- Patent number 8,434,423
- Issue date May 7, 2013
- Tokyo Electron Limited
- Takayuki Toshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,235,061
- Issue date Aug 7, 2012
- Tokyo Electron Limited
- Takayuki Toshima
- B08 - CLEANING
Information Patent Grant
Heating apparatus and heating method
- Patent number 8,217,313
- Issue date Jul 10, 2012
- Tokyo Electron Limited
- Tetsuo Fukuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate treatment apparatus
- Patent number 8,006,636
- Issue date Aug 30, 2011
- Tokyo Electron Limited
- Kazuo Terada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment device
- Patent number 7,871,265
- Issue date Jan 18, 2011
- Tokyo Electron Limited
- Tetsuo Fukuoka
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Method of forming a semiconductor memory device
- Patent number 6,048,767
- Issue date Apr 11, 2000
- NEC Corporation
- Kazuo Terada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor memory and method of fabricating the same
- Patent number 5,760,452
- Issue date Jun 2, 1998
- NEC Corporation
- Kazuo Terada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for controlling temperature in rapid heat trea...
- Patent number 5,616,264
- Issue date Apr 1, 1997
- Tokyo Electron Limited
- Katsuo Nishi
- C30 - CRYSTAL GROWTH
Information Patent Grant
Treatment object supporting device
- Patent number 5,334,257
- Issue date Aug 2, 1994
- Tokyo Electron Kabushiki Kaisha
- Hironobu Nishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for supporting and rotating substrates in a proce...
- Patent number 5,324,540
- Issue date Jun 28, 1994
- Tokyo Electron Limited
- Kazuo Terada
- C30 - CRYSTAL GROWTH
Information Patent Grant
Semiconductor memory cell having high density structure
- Patent number 5,172,202
- Issue date Dec 15, 1992
- NEC Corporation
- Terada Kazuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
IC memory cells with reduced alpha particle influence
- Patent number 4,706,107
- Issue date Nov 10, 1987
- Nippon Electric Co., Ltd.
- Kazuo Terada
- G11 - INFORMATION STORAGE

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20110000512
- Publication date Jan 6, 2011
- TOKYO ELECTRON LIMITED
- Takayuki TOSHIMA
- B08 - CLEANING
Information Patent Application
SUPERCRITICAL PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM AND...
- Publication number 20110000507
- Publication date Jan 6, 2011
- TOKYO ELECTRON LIMITED
- Takayuki TOSHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CARRYING APPARATUS AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20100192992
- Publication date Aug 5, 2010
- TOKYO ELECTRON LIMITED
- Takayuki TOSHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT APPARATUS
- Publication number 20090025637
- Publication date Jan 29, 2009
- TOKYO ELECTRON LIMITED
- Kazuo TERADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING APPARATUS AND HEATING METHOD
- Publication number 20080185370
- Publication date Aug 7, 2008
- TOKYO ELECTRON LIMITED
- Tetsuo Fukuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HEATING DEVICE, HEATING METHOD AND STORAGE MEDIUM
- Publication number 20080182217
- Publication date Jul 31, 2008
- TOKYO ELECTRON LIMITED
- Tetsuo Fukuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING DEVICE, COATING AND DEVELOPING SYSTEM, HEATING METHOD AND S...
- Publication number 20080169279
- Publication date Jul 17, 2008
- TOKYO ELECTRON LIMITED
- Tetsuo Fukuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heat treatment device
- Publication number 20080135207
- Publication date Jun 12, 2008
- TOKYO ELECTRON LIMITED
- Tetsuo Fukuoka
- F28 - HEAT EXCHANGE IN GENERAL

Terada Kazuo

Person

Patents Grantslast 30 patents

Supercritical processing apparatus, substrate processing system and...

Heating device, coating and developing system, heating method and s...

Substrate carrying apparatus having circumferential sidewall and su...

Substrate processing apparatus and substrate processing method

Heating apparatus and heating method

Substrate treatment apparatus

Heat treatment device

Method of forming a semiconductor memory device

Semiconductor memory and method of fabricating the same

Method and apparatus for controlling temperature in rapid heat trea...

Treatment object supporting device

System and method for supporting and rotating substrates in a proce...

Semiconductor memory cell having high density structure

IC memory cells with reduced alpha particle influence

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUPERCRITICAL PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM AND...

SUBSTRATE CARRYING APPARATUS AND SUBSTRATE PROCESSING SYSTEM

SUBSTRATE TREATMENT APPARATUS

HEATING APPARATUS AND HEATING METHOD

HEATING DEVICE, HEATING METHOD AND STORAGE MEDIUM

HEATING DEVICE, COATING AND DEVELOPING SYSTEM, HEATING METHOD AND S...

Heat treatment device