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Teresita Quitua Magtoto
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Poughkeepsie, NY, US
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Patents Grants
last 30 patents
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Patent Grant
Method and system for line-dimension control of an etch process
Patent number
7,700,378
Issue date
Apr 20, 2010
International Business Machines Corporation
Gary Walter Behm
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method and system for line-dimension control of an etch process
Patent number
7,291,285
Issue date
Nov 6, 2007
International Business Machines Corporation
Gary Walter Behm
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
METHOD AND SYSTEM FOR LINE-DIMENSION CONTROL OF AN ETCH PROCESS
Publication number
20080032428
Publication date
Feb 7, 2008
Gary Walter Behm
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Method and system for line-dimension control of an etch process
Publication number
20060255010
Publication date
Nov 16, 2006
International Business Machines Corporation
Gary Walter Behm
H01 - BASIC ELECTRIC ELEMENTS