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Terry A. Tabler
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Sandy Hook, CT, US
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Patents Grants
last 30 patents
Information
Patent Grant
Fluid distribution system and process, and semiconductor fabricatio...
Patent number
6,561,213
Issue date
May 13, 2003
Advanced Technology Materials, Inc.
Luping Wang
F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information
Patent Grant
Fluid distribution system and process, and semiconductor fabricatio...
Patent number
6,453,924
Issue date
Sep 24, 2002
Advanced Technology Materials, Inc.
Luping Wang
F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Patents Applications
last 30 patents
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Patent Application
Fluid distribution system and process, and semiconductor fabricatio...
Publication number
20020007849
Publication date
Jan 24, 2002
Advanced Technology Materials Inc.
Luping Wang
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC