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Terry Sheng
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Saratoga, CA, US
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last 30 patents
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Patent Grant
Step down dechucking
Patent number
8,164,879
Issue date
Apr 24, 2012
Advanced Ion Beam Technology, Inc.
Terry Sheng
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
INDIRECT HEATED CATHODE OF ION IMPLANTER
Publication number
20110018423
Publication date
Jan 27, 2011
Terry SHENG
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
STEP DOWN DECHUCKING
Publication number
20100254063
Publication date
Oct 7, 2010
Terry Sheng
H01 - BASIC ELECTRIC ELEMENTS