Terry T. Sheng

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Plasma immersion ion implantation process
- Patent number 6,632,482
- Issue date Oct 14, 2003
- Varian Semiconductor Equipment Associates, Inc.
- Terry Tienyu Sheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charge monitor for high potential pulse current dose measurement ap...
- Patent number 5,572,038
- Issue date Nov 5, 1996
- Varian Associates, Inc.
- Terry T. Sheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma immersion ion implantation (PI.sup.3) apparatus
- Patent number 5,354,381
- Issue date Oct 11, 1994
- Varian Associates, Inc.
- Terry T. Sheng
- H01 - BASIC ELECTRIC ELEMENTS