Terufumi Wakiyama

Person

Kumamoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Liquid processing apparatus
- Patent number 11,322,373
- Issue date May 3, 2022
- Tokyo Electron Limited
- Terufumi Wakiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,460,962
- Issue date Oct 29, 2019
- Tokyo Electron Limited
- Terufumi Wakiyama
- B08 - CLEANING
Information Patent Grant
Liquid processing apparatus
- Patent number 10,297,473
- Issue date May 21, 2019
- Tokyo Electron Limited
- Terufumi Wakiyama
- B08 - CLEANING
Information Patent Grant
Substrate processing system
- Patent number 10,276,425
- Issue date Apr 30, 2019
- Tokyo Electron Limited
- Terufumi Wakiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus
- Patent number 9,953,848
- Issue date Apr 24, 2018
- Tokyo Electron Limited
- Terufumi Wakiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing apparatus
- Patent number 9,773,687
- Issue date Sep 26, 2017
- Tokyo Electron Limited
- Terufumi Wakiyama
- B08 - CLEANING
Information Patent Grant
Liquid processing apparatus and cleaning method
- Patent number 9,387,520
- Issue date Jul 12, 2016
- Tokyo Electron Limited
- Nobuhiro Ogata
- B08 - CLEANING
Information Patent Grant
Liquid processing apparatus, liquid processing method, and computer...
- Patent number 9,108,231
- Issue date Aug 18, 2015
- Tokyo Electron Limited
- Nobuhiro Ogata
- B08 - CLEANING
Information Patent Grant
Liquid processing apparatus, liquid processing method, and computer...
- Patent number 8,845,815
- Issue date Sep 30, 2014
- Tokyo Electron Limited
- Nobuhiro Ogata
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
LIQUID PROCESSING APPARATUS
- Publication number 20180226277
- Publication date Aug 9, 2018
- TOKYO ELECTRON LIMITED
- Terufumi Wakiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD
- Publication number 20180185856
- Publication date Jul 5, 2018
- TOKYO ELECTRON LIMITED
- Hirofumi TAKEGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180130677
- Publication date May 10, 2018
- TOKYO ELECTRON LIMITED
- Terufumi Wakiyama
- B08 - CLEANING
Information Patent Application
LIQUID PROCESSING APPARATUS
- Publication number 20170345689
- Publication date Nov 30, 2017
- TOKYO ELECTRON LIMITED
- Terufumi Wakiyama
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20160148827
- Publication date May 26, 2016
- TOKYO ELECTRON LIMITED
- Terufumi Wakiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS
- Publication number 20150187613
- Publication date Jul 2, 2015
- TOKYO ELECTRON LIMITED
- Terufumi Wakiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS
- Publication number 20150090305
- Publication date Apr 2, 2015
- TOKYO ELECTRON LIMITED
- Terufumi Wakiyama
- B08 - CLEANING
Information Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND COMPUTER...
- Publication number 20140360540
- Publication date Dec 11, 2014
- Nobuhiro Ogata
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...
- Publication number 20140137893
- Publication date May 22, 2014
- TOKYO ELECTRON LIMITED
- Takahisa Otsuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS AND CLEANING METHOD
- Publication number 20140026927
- Publication date Jan 30, 2014
- Nobuhiro Ogata
- B08 - CLEANING
Information Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND COMPUTER...
- Publication number 20120260946
- Publication date Oct 18, 2012
- Nobuhiro OGATA
- B08 - CLEANING

Terufumi Wakiyama

Person

Patents Grantslast 30 patents

Liquid processing apparatus

Substrate processing apparatus

Liquid processing apparatus

Substrate processing system

Substrate liquid processing apparatus

Liquid processing apparatus

Liquid processing apparatus and cleaning method

Liquid processing apparatus, liquid processing method, and computer...

Liquid processing apparatus, liquid processing method, and computer...

Patents Applicationslast 30 patents

LIQUID PROCESSING APPARATUS

LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

LIQUID PROCESSING APPARATUS

SUBSTRATE PROCESSING SYSTEM

SUBSTRATE LIQUID PROCESSING APPARATUS

LIQUID PROCESSING APPARATUS

LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND COMPUTER...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...

LIQUID PROCESSING APPARATUS AND CLEANING METHOD

LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND COMPUTER...