Teruhiko Havano

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Shiga-ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Inspection apparatus and inspection method for pattern profile, and...
- Patent number 7,525,651
- Issue date Apr 28, 2009
- International Business Machines Corporation
- Mitsuru Uda
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
INSPECTION APPARATUS AND INSPECTION METHOD FOR PATTERN PROFILE, AND...
- Publication number 20080192257
- Publication date Aug 14, 2008
- International Business Machines Corporation
- Mitsuru Uda
- G01 - MEASURING TESTING