Teruhiko Hayano

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Shiga-ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Inspection device and inspection method for pattern profile, exposu...
- Patent number 7,310,141
- Issue date Dec 18, 2007
- International Business Machines Corporation
- Mitsuru Uda
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Inspection device and inspection method for pattern profile, exposu...
- Publication number 20050116187
- Publication date Jun 2, 2005
- Mitsuru Uda
- G01 - MEASURING TESTING