Teruhiko Ichimura

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Kanagawa-ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate holding apparatus and polishing apparatus
- Patent number 7,632,173
- Issue date Dec 15, 2009
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate holding apparatus and polishing apparatus
- Patent number 7,311,585
- Issue date Dec 25, 2007
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method
- Patent number 7,163,895
- Issue date Jan 16, 2007
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate holding device and polishing device
- Patent number 7,033,260
- Issue date Apr 25, 2006
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Wafer holder and polishing device
- Patent number 6,435,956
- Issue date Aug 20, 2002
- Ebara Corporation
- Shin Ohwada
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,425,809
- Issue date Jul 30, 2002
- Ebara Corporation
- Teruhiko Ichimura
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE HOLDING APPARATUS AND POLISHING APPARATUS
- Publication number 20100056028
- Publication date Mar 4, 2010
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Application
Substrate holding apparatus and polishing apparatus
- Publication number 20080119121
- Publication date May 22, 2008
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Application
Substrate holding apparatus and polishing apparatus
- Publication number 20060099892
- Publication date May 11, 2006
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Application
Polishing method
- Publication number 20060079092
- Publication date Apr 13, 2006
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Application
Substrate holding device and polishing device
- Publication number 20050107015
- Publication date May 19, 2005
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Application
Polishing method
- Publication number 20040198011
- Publication date Oct 7, 2004
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Application
Polishing surface constituting member and polishing apparatus using...
- Publication number 20030032378
- Publication date Feb 13, 2003
- Teruhiko Ichimura
- B24 - GRINDING POLISHING