Teruhiko Kodama

Person

Koshi City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,887,869
- Issue date Jan 30, 2024
- Tokyo Electron Limited
- Nobuhiko Mouri
- B08 - CLEANING
Information Patent Grant
Substrate processing method, substrate processing apparatus, and st...
- Patent number 11,693,319
- Issue date Jul 4, 2023
- Tokyo Electron Limited
- Keiichi Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate cleaning apparatus and substrate cleaning method
- Patent number 11,554,389
- Issue date Jan 17, 2023
- Tokyo Electron Limited
- Akihiro Kubo
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 11,532,487
- Issue date Dec 20, 2022
- Tokyo Electron Limited
- Akihiro Kubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing capable of suppressing a decrease in throughpu...
- Patent number 11,287,798
- Issue date Mar 29, 2022
- Tokyo Electron Limited
- Teruhiko Kodama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,139,182
- Issue date Oct 5, 2021
- Tokyo Electron Limited
- Nobuhiko Mouri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment apparatus, substrate treatment method, and comp...
- Patent number 11,126,086
- Issue date Sep 21, 2021
- Tokyo Electron Limited
- Teruhiko Kodama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method and sto...
- Patent number 10,840,079
- Issue date Nov 17, 2020
- Tokyo Electron Limited
- Yasushi Takiguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus, substrate processing method and sto...
- Patent number 10,649,335
- Issue date May 12, 2020
- Tokyo Electron Limited
- Teruhiko Kodama
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus, substrate processing method and mem...
- Patent number 10,528,028
- Issue date Jan 7, 2020
- Tokyo Electron Limited
- Teruhiko Kodama
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,074,542
- Issue date Sep 11, 2018
- Tokyo Electron Limited
- Akihiro Kubo
- B24 - GRINDING POLISHING
Information Patent Grant
Liquid processing method, memory medium and liquid processing appar...
- Patent number 9,972,512
- Issue date May 15, 2018
- Tokyo Electron Limited
- Akiko Kai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid processing method, memory medium and liquid processing appar...
- Patent number 9,786,488
- Issue date Oct 10, 2017
- Tokyo Electron Limited
- Akiko Kai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate backside texturing
- Patent number 9,711,419
- Issue date Jul 18, 2017
- Tokyo Electron Limited
- Carlos A. Fonseca
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus, substrate processing method and mem...
- Patent number 9,601,394
- Issue date Mar 21, 2017
- Tokyo Electron Limited
- Teruhiko Kodama
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240213046
- Publication date Jun 27, 2024
- TOKYO ELECTRON LIMITED
- Nobuhiko Mouri
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240189856
- Publication date Jun 13, 2024
- TOKYO ELECTRON LIMITED
- Teruhiko KODAMA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...
- Publication number 20230197475
- Publication date Jun 22, 2023
- TOKYO ELECTRON LIMITED
- Teruhiko KODAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...
- Publication number 20220113628
- Publication date Apr 14, 2022
- TOKYO ELECTRON LIMITED
- Keiichi TANAKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20210398827
- Publication date Dec 23, 2021
- TOKYO ELECTRON LIMITED
- Nobuhiko Mouri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
- Publication number 20210220878
- Publication date Jul 22, 2021
- TOKYO ELECTRON LIMITED
- Akihiro Kubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE WARPAGE CORRECTION METHOD, COMPUTER STORAGE MEDIUM, AND S...
- Publication number 20210039221
- Publication date Feb 11, 2021
- Tokyo Electron Limited
- Nozomu KANETAKE
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20200365417
- Publication date Nov 19, 2020
- TOKYO ELECTRON LIMITED
- Akihiro Kubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND MEM...
- Publication number 20200096966
- Publication date Mar 26, 2020
- TOKYO ELECTRON LIMITED
- Teruhiko KODAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT APPARATUS, SUBSTRATE TREATMENT METHOD, AND COMP...
- Publication number 20190212653
- Publication date Jul 11, 2019
- TOKYO ELECTRON LIMITED
- Teruhiko KODAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20190181022
- Publication date Jun 13, 2019
- TOKYO ELECTRON LIMITED
- Nobuhiko Mouri
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...
- Publication number 20180253007
- Publication date Sep 6, 2018
- TOKYO ELECTRON LIMITED
- Teruhiko KODAMA
- G01 - MEASURING TESTING
Information Patent Application
Substrate Processing Apparatus, Substrate Processing Method and Sto...
- Publication number 20180151343
- Publication date May 31, 2018
- TOKYO ELECTRON LIMITED
- Yasushi TAKIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING METHOD, MEMORY MEDIUM AND LIQUID PROCESSING APPAR...
- Publication number 20180019112
- Publication date Jan 18, 2018
- TOKYO ELECTRON LIMITED
- Akiko KAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND MEM...
- Publication number 20170139399
- Publication date May 18, 2017
- TOKYO ELECTRON LIMITED
- Teruhiko KODAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20170092504
- Publication date Mar 30, 2017
- TOKYO ELECTRON LIMITED
- Akihiro KUBO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING METHOD, MEMORY MEDIUM AND LIQUID PROCESSING APPAR...
- Publication number 20160096203
- Publication date Apr 7, 2016
- TOKYO ELECTRON LIMITED
- Akiko Kai
- B08 - CLEANING
Information Patent Application
SUBSTRATE BACKSIDE TEXTURING
- Publication number 20160043007
- Publication date Feb 11, 2016
- TOKYO ELECTRON LIMITED
- Carlos A. Fonseca
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND MEM...
- Publication number 20150255355
- Publication date Sep 10, 2015
- TOKYO ELECTRON LIMITED
- Teruhiko KODAMA
- H01 - BASIC ELECTRIC ELEMENTS

Teruhiko Kodama

Person

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Substrate processing method, substrate processing apparatus, and st...

Substrate cleaning apparatus and substrate cleaning method

Substrate processing apparatus

Substrate processing capable of suppressing a decrease in throughpu...

Substrate processing apparatus and substrate processing method

Substrate treatment apparatus, substrate treatment method, and comp...

Substrate processing apparatus, substrate processing method and sto...

Substrate processing apparatus, substrate processing method and sto...

Substrate processing apparatus, substrate processing method and mem...

Substrate processing method and substrate processing apparatus

Liquid processing method, memory medium and liquid processing appar...

Liquid processing method, memory medium and liquid processing appar...

Substrate backside texturing

Substrate processing apparatus, substrate processing method and mem...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD

SUBSTRATE WARPAGE CORRECTION METHOD, COMPUTER STORAGE MEDIUM, AND S...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND MEM...

SUBSTRATE TREATMENT APPARATUS, SUBSTRATE TREATMENT METHOD, AND COMP...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...

Substrate Processing Apparatus, Substrate Processing Method and Sto...

LIQUID PROCESSING METHOD, MEMORY MEDIUM AND LIQUID PROCESSING APPAR...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND MEM...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

LIQUID PROCESSING METHOD, MEMORY MEDIUM AND LIQUID PROCESSING APPAR...

SUBSTRATE BACKSIDE TEXTURING

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND MEM...