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Teruhiko MORIYA
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Koshi-Shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Light irradiating device
Patent number
10,877,376
Issue date
Dec 29, 2020
Tokyo Electron Limited
Ryo Shimada
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical processing apparatus and substrate processing apparatus
Patent number
10,747,121
Issue date
Aug 18, 2020
Tokyo Electron Limited
Teruhiko Moriya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Exposure apparatus, exposure apparatus adjustment method and storag...
Patent number
10,558,125
Issue date
Feb 11, 2020
Tokyo Electron Limited
Teruhiko Moriya
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE THICKNESS MEASURING DEVICE, SUBSTRATE PROCESSING SYSTEM,...
Publication number
20240369339
Publication date
Nov 7, 2024
TOKYO ELECTRON LIMITED
Teruhiko MORIYA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIGHT IRRADIATING DEVICE
Publication number
20200150537
Publication date
May 14, 2020
TOKYO ELECTRON LIMITED
Ryo Shimada
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
Publication number
20180164696
Publication date
Jun 14, 2018
TOKYO ELECTRON LIMITED
Teruhiko MORIYA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS, EXPOSURE APPARATUS ADJUSTMENT METHOD AND STORAG...
Publication number
20180136567
Publication date
May 17, 2018
TOKYO ELECTRON LIMITED
Teruhiko MORIYA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY