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Saitama, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method for evaluating the quality of a semiconductor substrate
Patent number
6,693,286
Issue date
Feb 17, 2004
Mitsubishi Materials Silicon Corporation
Takeshi Hasegawa
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for evaluating the quality of a semiconductor...
Patent number
6,534,774
Issue date
Mar 18, 2003
Mitsubishi Materials Silicon Corporation
Takeshi Hasegawa
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
Method and apparatus for evaluating the quality of a semiconductor...
Publication number
20030094579
Publication date
May 22, 2003
Takeshi Hasegawa
G01 - MEASURING TESTING
Information
Patent Application
Method and apparatus for evaluating the quality of a semiconductor...
Publication number
20020045283
Publication date
Apr 18, 2002
Mitsubishi Materials Silicon Corporation
Takeshi Hasegawa
G01 - MEASURING TESTING