Terumi Muguruma

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Kanagawa-ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Wafer container
- Patent number 6,926,029
- Issue date Aug 9, 2005
- Kabushiki Kaisha Toshiba
- Kiyotaka Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer container
- Patent number 6,883,539
- Issue date Apr 26, 2005
- Kabushiki Kaisha Toshiba
- Kiyotaka Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pod and method of cleaning it
- Patent number 6,422,247
- Issue date Jul 23, 2002
- Kabushiki Kaisha Toshiba
- Noriaki Yoshikawa
- B08 - CLEANING
Information Patent Grant
Pod and method of cleaning it
- Patent number 6,267,123
- Issue date Jul 31, 2001
- Kabushiki Kaisha Toshiba
- Noriaki Yoshikawa
- B08 - CLEANING
Information Patent Grant
Clean storage equipment for substrates and method of storing substr...
- Patent number 6,123,120
- Issue date Sep 26, 2000
- Kabushiki Kaisha Toshiba
- Tadashi Yotsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma ashing method
- Patent number 5,294,292
- Issue date Mar 15, 1994
- Kabushiki Kaisha Toshiba
- Eiji Yamashita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
WAFER CONTAINER
- Publication number 20050098218
- Publication date May 12, 2005
- Kabushiki Kaisha Toshiba
- Kiyotaka Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer container
- Publication number 20040055650
- Publication date Mar 25, 2004
- Kabushiki Kaisha Toshiba
- Kiyotaka Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pod and method of cleaning it
- Publication number 20010020480
- Publication date Sep 13, 2001
- KABUSHIKI KAISHA TOSHIBA
- Noriaki Yoshikawa
- H01 - BASIC ELECTRIC ELEMENTS