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Patents Grants
last 30 patents
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Patent Grant
Surface inspection apparatus and surface inspection method
Patent number
9,036,141
Issue date
May 19, 2015
Hitachi High-Technologies Corporation
Terumi Obuchi
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
SURFACE INSPECTION APPARATUS AND SURFACE INSPECTION METHOD
Publication number
20120327403
Publication date
Dec 27, 2012
Hitachi High-Technologies Corporation
Terumi OBUCHI
G01 - MEASURING TESTING