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Terumi Yanagi
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Osaka, JP
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Patents Grants
last 30 patents
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Patent Grant
Thin film piezoelectric element, method of manufacturing the same,...
Patent number
7,064,401
Issue date
Jun 20, 2006
Matsushita Electric Industrial Co., Ltd.
Hirokazu Uchiyama
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Thin film piezoelectric element, method of manufacturing the same,...
Publication number
20040183403
Publication date
Sep 23, 2004
Hirokazu Uchiyama
H01 - BASIC ELECTRIC ELEMENTS