Teruo Asakawa

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Processing instructing device, processing instructing method, compu...
- Patent number 9,696,711
- Issue date Jul 4, 2017
- Tokyo Electron Limited
- Teruo Asakawa
- G05 - CONTROLLING REGULATING
Information Patent Grant
Operation limiting device, operation limiting method, and storage m...
- Patent number 9,639,686
- Issue date May 2, 2017
- Tokyo Electron Limited
- Teruo Asakawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Production efficiency improving apparatus, production efficiency im...
- Patent number 9,268,328
- Issue date Feb 23, 2016
- Tokyo Electron Limited
- Teruo Asakawa
- G05 - CONTROLLING REGULATING
Information Patent Grant
Carrying system, substrate treating device, and carrying method
- Patent number 8,025,473
- Issue date Sep 27, 2011
- Tokyo Electron Limited
- Teruo Asakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device manufacturing method and manufacturing line th...
- Patent number 7,566,665
- Issue date Jul 28, 2009
- Tokyo Electron Limited
- Junichi Inoue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Transfer apparatus
- Patent number 6,988,867
- Issue date Jan 24, 2006
- Tokyo Electron Limited
- Hiroaki Saeki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device and manufacturing line...
- Patent number 6,841,485
- Issue date Jan 11, 2005
- Tokyo Electron Limited
- Junichi Inoue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus
- Patent number 6,802,934
- Issue date Oct 12, 2004
- Tokyo Electron Limited
- Hiroaki Saeki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Drive mechanism having a gas bearing operable under a negative pres...
- Patent number 6,285,102
- Issue date Sep 4, 2001
- Tokyo Electron Limited
- Takaaki Matsuoka
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Controlling gas in a multichamber processing system
- Patent number 6,224,679
- Issue date May 1, 2001
- Tokyo Electron Limited
- Yoshiaki Sasaki
- B08 - CLEANING
Information Patent Grant
Transfer arm apparatus and semiconductor processing system using th...
- Patent number 6,068,704
- Issue date May 30, 2000
- Tokyo Electron Limited
- Hiroaki Saeki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer for carrying semiconductor wafers and method detecting wafers...
- Patent number 6,053,983
- Issue date Apr 25, 2000
- Tokyo Electron, Ltd.
- Hiroaki Saeki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Relay apparatus for relaying object to be treated
- Patent number 6,013,112
- Issue date Jan 11, 2000
- Tokyo Electron Limited
- Yoji Iizuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cassette transfer mechanism
- Patent number 5,947,677
- Issue date Sep 7, 1999
- Tokyo Electron Limited
- Keiichi Matsushima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-chamber treatment system
- Patent number 5,934,856
- Issue date Aug 10, 1999
- Tokyo Electron Limited
- Teruo Asakawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cassette chamber
- Patent number 5,857,827
- Issue date Jan 12, 1999
- Tokyo Electron Limited
- Teruo Asakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for performing serial communication between ma...
- Patent number 5,754,780
- Issue date May 19, 1998
- Tokyo Electron Limited
- Teruo Asakawa
- G05 - CONTROLLING REGULATING
Information Patent Grant
Stage having electrostatic chuck and plasma processing apparatus us...
- Patent number 5,460,684
- Issue date Oct 24, 1995
- Tokyo Electron Limited
- Hiroaki Saeki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Load-lock unit and wafer transfer system
- Patent number 5,435,683
- Issue date Jul 25, 1995
- Tokyo Electron Limited
- Tetsu Oosawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load-lock unit and wafer transfer system
- Patent number 5,405,230
- Issue date Apr 11, 1995
- Tokyo Electron Limited
- Hiroo Ono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion injection device
- Patent number 5,382,803
- Issue date Jan 17, 1995
- Tokyo Electron Limited
- Teruo Asakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer device for transferring a substrate
- Patent number 5,374,147
- Issue date Dec 20, 1994
- Tokyo Electron Limited
- Tsutomu Hiroki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing method for wafers
- Patent number 5,357,115
- Issue date Oct 18, 1994
- Tokyo Electron Limited
- Teruo Asakawa
- C30 - CRYSTAL GROWTH
Information Patent Grant
Load-lock unit and wafer transfer system
- Patent number 5,340,261
- Issue date Aug 23, 1994
- Tokyo Electron Limited
- Tetsu Oosawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing system
- Patent number 5,248,886
- Issue date Sep 28, 1993
- Tokyo Electron Limited
- Teruo Asakawa
- C30 - CRYSTAL GROWTH
Information Patent Grant
Handling apparatus for transferring carriers and a method of transf...
- Patent number 5,064,337
- Issue date Nov 12, 1991
- Tokyo Electron Limited
- Teruo Asakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stock unit for storing carriers
- Patent number 4,986,715
- Issue date Jan 22, 1991
- Tokyo Electron Limited
- Teruo Asakawa
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Two-dimensional positioning device
- Patent number 4,626,749
- Issue date Dec 2, 1986
- Tokyo Electron Limited
- Teruo Asakawa
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
Operation Limiting Device, Operation Limiting Method, and Storage M...
- Publication number 20150332039
- Publication date Nov 19, 2015
- TOKYO ELECTRON LIMITED
- Teruo ASAKAWA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PROCESSING INSTRUCTING DEVICE, PROCESSING INSTRUCTING METHOD, COMPU...
- Publication number 20140358271
- Publication date Dec 4, 2014
- TOKYO ELECTRON LIMITED
- Teruo Asakawa
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
PRODUCTION EFFICIENCY IMPROVING APPARATUS, PRODUCTION EFFICIENCY IM...
- Publication number 20140018955
- Publication date Jan 16, 2014
- TOKYO ELECTRON LIMITED
- Teruo Asakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Carrying system, substrate treating device, and carrying method
- Publication number 20090016859
- Publication date Jan 15, 2009
- Teruo Asakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor device manufacturing method and manufacturing line th...
- Publication number 20050260824
- Publication date Nov 24, 2005
- TOKYO ELECTRON LIMITED
- Junichi Inoue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor device manufacturing method and manufacturing line th...
- Publication number 20050112889
- Publication date May 26, 2005
- Junichi Inoue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Transfer apparatus
- Publication number 20040062632
- Publication date Apr 1, 2004
- Hiroaki Saeki
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Processing apparatus
- Publication number 20030136515
- Publication date Jul 24, 2003
- Hiroaki Saeki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processing apparatus
- Publication number 20020020355
- Publication date Feb 21, 2002
- Hiroaki Saeki
- H01 - BASIC ELECTRIC ELEMENTS

Teruo Asakawa

Person

Patents Grantslast 30 patents

Processing instructing device, processing instructing method, compu...

Operation limiting device, operation limiting method, and storage m...

Production efficiency improving apparatus, production efficiency im...

Carrying system, substrate treating device, and carrying method

Semiconductor device manufacturing method and manufacturing line th...

Transfer apparatus

Method of manufacturing semiconductor device and manufacturing line...

Processing apparatus

Drive mechanism having a gas bearing operable under a negative pres...

Controlling gas in a multichamber processing system

Transfer arm apparatus and semiconductor processing system using th...

Wafer for carrying semiconductor wafers and method detecting wafers...

Relay apparatus for relaying object to be treated

Cassette transfer mechanism

Multi-chamber treatment system

Cassette chamber

Apparatus and method for performing serial communication between ma...

Stage having electrostatic chuck and plasma processing apparatus us...

Load-lock unit and wafer transfer system

Load-lock unit and wafer transfer system

Ion injection device

Transfer device for transferring a substrate

Processing method for wafers

Load-lock unit and wafer transfer system

Processing system

Handling apparatus for transferring carriers and a method of transf...

Stock unit for storing carriers

Two-dimensional positioning device

Patents Applicationslast 30 patents

Operation Limiting Device, Operation Limiting Method, and Storage M...

PROCESSING INSTRUCTING DEVICE, PROCESSING INSTRUCTING METHOD, COMPU...

PRODUCTION EFFICIENCY IMPROVING APPARATUS, PRODUCTION EFFICIENCY IM...

Carrying system, substrate treating device, and carrying method

Semiconductor device manufacturing method and manufacturing line th...

Semiconductor device manufacturing method and manufacturing line th...

Transfer apparatus

Processing apparatus

Processing apparatus