Teruomi Minami

Person

Koshi-City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method, recording medium and substrate process...
- Patent number 11,201,050
- Issue date Dec 14, 2021
- Tokyo Electron Limited
- Itaru Kanno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process and apparatus for processing a nitride structure without si...
- Patent number 10,916,440
- Issue date Feb 9, 2021
- Tokyo Electron Limited
- Derek Bassett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process and apparatus for processing a nitride structure without si...
- Patent number 10,515,820
- Issue date Dec 24, 2019
- Tokyo Electron Limited
- Derek Bassett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
- Patent number 10,026,629
- Issue date Jul 17, 2018
- Tokyo Electron Limited
- Mitsunori Nakamori
- B08 - CLEANING
Information Patent Grant
Substrate processing method, substrate processing apparatus, and st...
- Patent number 9,362,106
- Issue date Jun 7, 2016
- Sony Corporation
- Hayato Iwamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, storage medium storing computer progra...
- Patent number 9,321,085
- Issue date Apr 26, 2016
- Tokyo Electron Limited
- Teruomi Minami
- B08 - CLEANING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 8,978,671
- Issue date Mar 17, 2015
- Tokyo Electron Limited
- Satoru Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, storage medium storing computer progra...
- Patent number 8,906,165
- Issue date Dec 9, 2014
- Tokyo Electron Limited
- Teruomi Minami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, storage medium storing computer progra...
- Patent number 8,545,640
- Issue date Oct 1, 2013
- Tokyo Electron Limited
- Teruomi Minami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
- Patent number 8,475,668
- Issue date Jul 2, 2013
- Tokyo Electron Limited
- Hiroshi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing apparatus, liquid processing method, and storage...
- Patent number 8,371,318
- Issue date Feb 12, 2013
- Tokyo Electron Limited
- Teruomi Minami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning apparatus, cleaning method and recording medium
- Patent number 8,308,870
- Issue date Nov 13, 2012
- Tokyo Electron Limited
- Teruomi Minami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing apparatus, liquid processing method, and storage...
- Patent number 8,303,723
- Issue date Nov 6, 2012
- Tokyo Electron Limited
- Teruomi Minami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning method
- Patent number 7,678,199
- Issue date Mar 16, 2010
- Tokyo Electron Limited
- Shogo Mizota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for drying semiconductor substrate
- Patent number 6,158,141
- Issue date Dec 12, 2000
- Sony Corporation
- Kazumi Asada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Drying treatment method and apparatus
- Patent number 6,029,371
- Issue date Feb 29, 2000
- Tokyo Electron Limited
- Yuji Kamikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate drying apparatus and substrate drying method
- Patent number 5,671,544
- Issue date Sep 30, 1997
- Tokyo Electron Limited
- Kenji Yokomizo
- F26 - DRYING
Information Patent Grant
Substrate drying apparatus and substrate drying method
- Patent number 5,575,079
- Issue date Nov 19, 1996
- Tokyo Electron Limited
- Kenji Yokomizo
- F26 - DRYING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD, RECORDING MEDIUM AND SUBSTRATE PROCESS...
- Publication number 20190355574
- Publication date Nov 21, 2019
- TOKYO ELECTRON LIMITED
- Itaru Kanno
- F26 - DRYING
Information Patent Application
PROCESS AND APPARATUS FOR PROCESSING A NITRIDE STRUCTURE WITHOUT SI...
- Publication number 20190237339
- Publication date Aug 1, 2019
- TOKYO ELECTRON LIMITED
- Derek Bassett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID PROCESSING METHOD, SUBSTRATE LIQUID PROCESSING APP...
- Publication number 20170301534
- Publication date Oct 19, 2017
- TOKYO ELECTRON LIMITED
- Mitsunori Nakamori
- B08 - CLEANING
Information Patent Application
Process and Apparatus for Processing a Nitride Structure Without Si...
- Publication number 20170287726
- Publication date Oct 5, 2017
- TOKYO ELECTRON LIMITED
- Derek Bassett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
- Publication number 20160111303
- Publication date Apr 21, 2016
- TOKYO ELECTRON LIMITED
- Mitsunori Nakamori
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...
- Publication number 20140080312
- Publication date Mar 20, 2014
- Hayato IWAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, STORAGE MEDIUM STORING COMPUTER PROGRA...
- Publication number 20130133695
- Publication date May 30, 2013
- TOKYO ELECTRON LIMITED
- Teruomi Minami
- B08 - CLEANING
Information Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...
- Publication number 20120312332
- Publication date Dec 13, 2012
- TOKYO ELECTRON LIMITED
- Teruomi Minami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Method and Substrate Processing Apparatus
- Publication number 20120164840
- Publication date Jun 28, 2012
- Satoru Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, STORAGE MEDIUM STORING COMPUTER PROGRA...
- Publication number 20110315169
- Publication date Dec 29, 2011
- TOKYO ELECTRON LIMITED
- Teruomi MINAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, STORAGE MEDIUM STORING COMPUTER PROGRA...
- Publication number 20110308549
- Publication date Dec 22, 2011
- TOKYO ELECTRON LIMITED
- Teruomi MINAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
- Publication number 20110089137
- Publication date Apr 21, 2011
- TOKYO ELECTRON LIMITED
- Hiroshi TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...
- Publication number 20100319734
- Publication date Dec 23, 2010
- TOKYO ELECTRON LIMITED
- Teruomi MINAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING APPARATUS, CLEANING METHOD AND RECORDING MEDIUM
- Publication number 20100108103
- Publication date May 6, 2010
- TOKYO ELECTRON LIMITED
- Teruomi MINAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Liquid processing method and apparatus
- Publication number 20100108096
- Publication date May 6, 2010
- TOKYO ELECTRON LIMITED
- Teruomi Minami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Liquid processing apparatus, liquid processing method, and storage...
- Publication number 20090056764
- Publication date Mar 5, 2009
- TOKYO ELECTRON LIMITED
- Teruomi Minami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING METHOD
- Publication number 20080053489
- Publication date Mar 6, 2008
- TOKYO ELECTRON LIMITED
- Shogo Mizota
- H01 - BASIC ELECTRIC ELEMENTS

Teruomi Minami

Person

Patents Grantslast 30 patents

Substrate processing method, recording medium and substrate process...

Process and apparatus for processing a nitride structure without si...

Process and apparatus for processing a nitride structure without si...

Substrate liquid processing apparatus, substrate liquid processing...

Substrate processing method, substrate processing apparatus, and st...

Substrate processing method, storage medium storing computer progra...

Substrate processing method and substrate processing apparatus

Substrate processing method, storage medium storing computer progra...

Substrate processing method, storage medium storing computer progra...

Substrate liquid processing apparatus, substrate liquid processing...

Liquid processing apparatus, liquid processing method, and storage...

Cleaning apparatus, cleaning method and recording medium

Liquid processing apparatus, liquid processing method, and storage...

Substrate cleaning method

Apparatus and method for drying semiconductor substrate

Drying treatment method and apparatus

Substrate drying apparatus and substrate drying method

Substrate drying apparatus and substrate drying method

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD, RECORDING MEDIUM AND SUBSTRATE PROCESS...

PROCESS AND APPARATUS FOR PROCESSING A NITRIDE STRUCTURE WITHOUT SI...

SUBSTRATE LIQUID PROCESSING METHOD, SUBSTRATE LIQUID PROCESSING APP...

Process and Apparatus for Processing a Nitride Structure Without Si...

SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...

SUBSTRATE PROCESSING METHOD, STORAGE MEDIUM STORING COMPUTER PROGRA...

LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...

Substrate Processing Method and Substrate Processing Apparatus

SUBSTRATE PROCESSING METHOD, STORAGE MEDIUM STORING COMPUTER PROGRA...

SUBSTRATE PROCESSING METHOD, STORAGE MEDIUM STORING COMPUTER PROGRA...

SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...

LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...

CLEANING APPARATUS, CLEANING METHOD AND RECORDING MEDIUM

Liquid processing method and apparatus

Liquid processing apparatus, liquid processing method, and storage...

SUBSTRATE CLEANING METHOD