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Terushige Takeyama
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate support mechanism and substrate rotation device
Patent number
6,660,089
Issue date
Dec 9, 2003
Anelva Corporation
Naoyuki Nozawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Magnetic carrying device
Patent number
6,561,343
Issue date
May 13, 2003
Anelva Corporation
Nobuhito Miyauchi
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Grant
Sputtering device
Patent number
6,461,484
Issue date
Oct 8, 2002
Anelva Corporation
Kamikura Yo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate transfer apparatus of substrate processing system
Patent number
6,319,373
Issue date
Nov 20, 2001
Anelva Corporation
Terushige Takeyama
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
DEPOSITION APPARATUS AND DEPOSITION METHOD
Publication number
20100055348
Publication date
Mar 4, 2010
Canon ANELVA Corporation
Terushige TAKEYAMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Magnetic carrying device
Publication number
20020144881
Publication date
Oct 10, 2002
Nobuhito Miyauchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Magnetic carrying device
Publication number
20020060134
Publication date
May 23, 2002
Nobuhito Miyauchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Sputtering device
Publication number
20020029959
Publication date
Mar 14, 2002
Kamikura Yo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Substrate support mechanism and substrate rotation device
Publication number
20010010256
Publication date
Aug 2, 2001
Naoyuki Nozawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Substrate transfer apparatus of substrate processing system
Publication number
20010010204
Publication date
Aug 2, 2001
ANELVA CORPORATION
Terushige Takeyama
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...