TREA

Terushige Takeyama

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  • Tokyo, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Substrate support mechanism and substrate rotation device
    • Patent number 6,660,089
    • Issue date Dec 9, 2003
    • Anelva Corporation
    • Naoyuki Nozawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Magnetic carrying device
    • Patent number 6,561,343
    • Issue date May 13, 2003
    • Anelva Corporation
    • Nobuhito Miyauchi
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
  • Information Patent Grant

    Sputtering device
    • Patent number 6,461,484
    • Issue date Oct 8, 2002
    • Anelva Corporation
    • Kamikura Yo
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate transfer apparatus of substrate processing system
    • Patent number 6,319,373
    • Issue date Nov 20, 2001
    • Anelva Corporation
    • Terushige Takeyama
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    DEPOSITION APPARATUS AND DEPOSITION METHOD
    • Publication number 20100055348
    • Publication date Mar 4, 2010
    • Canon ANELVA Corporation
    • Terushige TAKEYAMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Magnetic carrying device
    • Publication number 20020144881
    • Publication date Oct 10, 2002
    • Nobuhito Miyauchi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Magnetic carrying device
    • Publication number 20020060134
    • Publication date May 23, 2002
    • Nobuhito Miyauchi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Sputtering device
    • Publication number 20020029959
    • Publication date Mar 14, 2002
    • Kamikura Yo
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Substrate support mechanism and substrate rotation device
    • Publication number 20010010256
    • Publication date Aug 2, 2001
    • Naoyuki Nozawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Substrate transfer apparatus of substrate processing system
    • Publication number 20010010204
    • Publication date Aug 2, 2001
    • ANELVA CORPORATION
    • Terushige Takeyama
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...