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Patents Grants
last 30 patents
Information
Patent Grant
Charged particle beam device
Patent number
9,330,883
Issue date
May 3, 2016
Hitachi High-Technologies Corporation
Terutaka Nanri
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device and sample production method
Patent number
8,933,423
Issue date
Jan 13, 2015
Hitachi High-Technologies Corporation
Terutaka Nanri
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus and film thickness measurement method
Patent number
8,680,465
Issue date
Mar 25, 2014
Hitachi High-Technologies Corporation
Satoshi Tomimatsu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE
Publication number
20150014529
Publication date
Jan 15, 2015
Hitachi High-Technologies Corporation
Terutaka Nanri
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE AND SAMPLE PRODUCTION METHOD
Publication number
20140076717
Publication date
Mar 20, 2014
Hitachi High-Technologies Corporation
Terutaka Nanri
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE AND METHOD OF MANUFACTURE OF SAMPLE
Publication number
20130277552
Publication date
Oct 24, 2013
Hitachi High-Technologies Corporation
Terutaka Nanri
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE AND SAMPLE PRODUCTION METHOD
Publication number
20130105302
Publication date
May 2, 2013
Terutaka Nanri
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Charged Particle Beam Apparatus and Film Thickness Measurement Method
Publication number
20120187292
Publication date
Jul 26, 2012
Hitachi High-Technologies Corporation
Satoshi Tomimatsu
H01 - BASIC ELECTRIC ELEMENTS