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Patents Grants
last 30 patents
Information
Patent Grant
Reduced-pressure drying apparatus
Patent number
10,615,378
Issue date
Apr 7, 2020
Tokyo Electron Limited
Akinori Shimamura
F26 - DRYING
Information
Patent Grant
Substrate processing apparatus and particle adhesion preventing method
Patent number
8,950,999
Issue date
Feb 10, 2015
Tokyo Electron Limited
Akitake Tamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate cleaning apparatus, substrate cleaning method, and substr...
Patent number
8,945,412
Issue date
Feb 3, 2015
Tokyo Electron Limited
Shigeru Kawamura
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Pattern-forming method and method for manufacturing semiconductor d...
Patent number
8,809,207
Issue date
Aug 19, 2014
Tokyo Electron Limited
Hiraku Ishikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sealing film forming method, sealing film forming device, and light...
Patent number
8,674,397
Issue date
Mar 18, 2014
Tokyo Electron Limited
Hiraku Ishikawa
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
8,647,440
Issue date
Feb 11, 2014
Tokyo Electron Limited
Shigeru Kawamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle sticking prevention apparatus and plasma processing apparatus
Patent number
8,608,422
Issue date
Dec 17, 2013
Tokyo Electron Limited
Tsuyoshi Moriya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for analyzing quartz member
Patent number
8,268,185
Issue date
Sep 18, 2012
Tokyo Electron Limited
Kazuya Dobashi
G01 - MEASURING TESTING
Information
Patent Grant
Defect inspecting method and defect inspecting apparatus
Patent number
8,040,504
Issue date
Oct 18, 2011
Tokyo Electron Limited
Misako Saito
G01 - MEASURING TESTING
Information
Patent Grant
Examination method and examination assistant device for quartz prod...
Patent number
8,021,623
Issue date
Sep 20, 2011
Tokyo Electron Limited
Masayuki Oikawa
G01 - MEASURING TESTING
Information
Patent Grant
Pattern forming method, semiconductor device manufacturing apparatu...
Patent number
8,008,211
Issue date
Aug 30, 2011
Tokyo Electron Limited
Akitake Tamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum processing apparatus and method
Patent number
7,993,458
Issue date
Aug 9, 2011
Tokyo Electron Limited
Masaki Kondo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and method for measuring the concentration of organic gas
Patent number
7,946,152
Issue date
May 24, 2011
Tokyo Electron Limited
Misako Saito
G01 - MEASURING TESTING
Information
Patent Grant
Analysis method and analysis apparatus
Patent number
7,923,680
Issue date
Apr 12, 2011
Tokyo Electron Limited
Kazuya Dobashi
G01 - MEASURING TESTING
Information
Patent Grant
Vacuum processing apparatus and method
Patent number
7,883,582
Issue date
Feb 8, 2011
Tokyo Electron Limited
Masaki Kondo
Information
Patent Grant
Particle measuring method and particle measuring apparatus
Patent number
7,508,518
Issue date
Mar 24, 2009
Tokyo Electron Limited
Akitake Tamura
G01 - MEASURING TESTING
Information
Patent Grant
Electric wire and cable with coating/covering of polyvinyl chloride...
Patent number
7,420,118
Issue date
Sep 2, 2008
Tokyo Electron Limited
Kiyoshi Watanabe
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Method and apparatus for treating article to be treated
Patent number
7,208,428
Issue date
Apr 24, 2007
Tokyo Electron Limited
Shingo Hishiya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electric wire coated with polyvinyl chloride resin composition and...
Patent number
6,903,264
Issue date
Jun 7, 2005
Tokyo Electron Limited
Kiyoshi Watanabe
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Method for deciding on the timing of replacing a chemical filter, f...
Patent number
6,537,347
Issue date
Mar 25, 2003
Omron Corporation
Satoshi Motouji
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Method and device for treating substrate
Patent number
6,403,498
Issue date
Jun 11, 2002
Tokyo Electron Limited
Takenobu Matsuo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer boat and film formation method
Patent number
6,344,387
Issue date
Feb 5, 2002
Tokyo Electron Limited
Kazuhide Hasebe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Thickness measuring apparatus, substrate processing method, and sub...
Patent number
6,331,890
Issue date
Dec 18, 2001
Tokyo Electron Limited
Yoshinori Marumo
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
REDUCED-PRESSURE DRYING APPARATUS
Publication number
20180097205
Publication date
Apr 5, 2018
Akinori SHIMAMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20150114562
Publication date
Apr 30, 2015
TOKYO ELECTRON LIMITED
Akitake TAMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PATTERN-FORMING METHOD AND METHOD FOR MANUFACTURING SEMICONDUCTOR D...
Publication number
20140080307
Publication date
Mar 20, 2014
TOKYO ELECTRON LIMITED
Hiraku Ishikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM FORMING DEVICE, SUBSTRATE PROCESSING SYSTEM AND SEMICONDUCTOR...
Publication number
20130330928
Publication date
Dec 12, 2013
TOKYO ELECTRON LIMITED
Hiraku Ishikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EVAPORATING APPARATUS AND EVAPORATING METHOD
Publication number
20130209666
Publication date
Aug 15, 2013
TOKYO ELECTRON LIMITED
Tomiko Kamada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEALING FILM FORMING METHOD, SEALING FILM FORMING DEVICE, AND LIGHT...
Publication number
20130126939
Publication date
May 23, 2013
TOKYO ELECTRON LIMITED
Hiraku ISHIKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND SUBSTR...
Publication number
20120298132
Publication date
Nov 29, 2012
TOKYO ELECTRON LIMITED
Shigeru KAWAMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SPUTTERING DEVICE
Publication number
20120160671
Publication date
Jun 28, 2012
TOKYO ELECTRON LIMITED
Hiraku Ishikawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VAPOR DEPOSITION APPARATUS AND VAPOR DEPOSITION METHOD
Publication number
20120094014
Publication date
Apr 19, 2012
TOKYO ELECTRON LIMITED
Yuji Ono
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEPOSITION HEAD AND FILM FORMING APPARATUS
Publication number
20120031339
Publication date
Feb 9, 2012
TOKYO ELECTRON LIMITED
Yuji Ono
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM
Publication number
20110240223
Publication date
Oct 6, 2011
Tokyo Electron Limited
Shinji Matsubayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMPONENT FOR SEMICONDUCTOR PROCESSING APPARATUS AND MANUFACTURING...
Publication number
20110244693
Publication date
Oct 6, 2011
Akitake Tamura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ATMOSPHERE CLEANING DEVICE
Publication number
20110090612
Publication date
Apr 21, 2011
TOKYO ELECTRON LIMITED
Junji Oikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEFECT INSPECTING METHOD AND DEFECT INSPECTING APPARATUS
Publication number
20100245812
Publication date
Sep 30, 2010
Tokyo Electron Limited
Misako Saito
G01 - MEASURING TESTING
Information
Patent Application
SOURCE GAS GENERATING DEVICE AND FILM FORMING APPARATUS
Publication number
20100154712
Publication date
Jun 24, 2010
TOKYO ELECTRON LIMITED
Akitake Tamura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND PARTICLE ADHESION PREVENTING METHOD
Publication number
20100111648
Publication date
May 6, 2010
TOKYO ELECTRON LIMITED
Akitake Tamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20100043820
Publication date
Feb 25, 2010
TOKYO ELECTRON LIMITED
Shigeru KAWAMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Analyzing Method and Analyzing Apparatus
Publication number
20090218483
Publication date
Sep 3, 2009
Tokyo Electron Limited
Kazuya Dobashi
G01 - MEASURING TESTING
Information
Patent Application
SUBSTRATE INSPECTION DEVICE AND SUBSTRATE INSPECTION METHOD
Publication number
20090206255
Publication date
Aug 20, 2009
Tokyo Electron Limited
Misako Saito
G01 - MEASURING TESTING
Information
Patent Application
SUBSTRATE INSPECTION METHOD, SUBSTRATE INSPECTION APPARATUS AND STO...
Publication number
20090206253
Publication date
Aug 20, 2009
TOKYO ELECTRON LIMITED
Misako SAITO
G01 - MEASURING TESTING
Information
Patent Application
Component for semicondutor processing apparatus and manufacturing m...
Publication number
20090194233
Publication date
Aug 6, 2009
Tokyo Electron Limited
Akitake Tamura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS PURIFYING APPARATUS AND SEMICONDUCTOR MANUFACTURING APPARATUS
Publication number
20090183476
Publication date
Jul 23, 2009
TOKYO ELECTRON LIMITED
Kazuya Dobashi
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
PATTERN FORMING METHOD, SEMICONDUCTOR DEVICE MANUFACTURING APPARATU...
Publication number
20090176374
Publication date
Jul 9, 2009
TOKYO ELECTRON LIMITED
Akitake TAMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR MEASURING THE CONCENTRATION OF ORGANIC GAS
Publication number
20090113991
Publication date
May 7, 2009
TOKYO ELECTRON LIMITED
Misako Saito
G01 - MEASURING TESTING
Information
Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND SUBSTR...
Publication number
20090065027
Publication date
Mar 12, 2009
TOKYO ELECTRON LIMITED
Shigeru Kawamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for Analyzing Quartz Member
Publication number
20080302762
Publication date
Dec 11, 2008
Tokyo Electron Limited
Kazuya Dobashi
G01 - MEASURING TESTING
Information
Patent Application
VACUUM PROCESSING APPARATUS AND METHOD
Publication number
20080274288
Publication date
Nov 6, 2008
TOKYO ELECTRON LIMITED
Masaki KONDO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Particle measuring method and particle measuring apparatus
Publication number
20080239283
Publication date
Oct 2, 2008
TOKYO ELECTRON LIMITED
Akitake Tamura
G01 - MEASURING TESTING
Information
Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE PROCESSING APPARATUS
Publication number
20080230096
Publication date
Sep 25, 2008
TOKYO ELECTRON LIMITED
Shigeru KAWAMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Examination method and examination assistant device for quartz prod...
Publication number
20070008638
Publication date
Jan 11, 2007
TOKYO ELECTON LIMITED
Masayuki Oikawa
G01 - MEASURING TESTING