Teruyuki Watanabe

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate holding apparatus, substrate holding method, and substrat...
- Patent number 8,777,198
- Issue date Jul 15, 2014
- Ebara Corporation
- Masahiko Sekimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and apparatus
- Patent number 8,225,803
- Issue date Jul 24, 2012
- Ebara Corporation
- Seiji Katsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate holding apparatus, substrate holding method, and substrat...
- Patent number 8,141,513
- Issue date Mar 27, 2012
- Ebara Corporation
- Masahiko Sekimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate polishing apparatus and method
- Patent number 7,976,362
- Issue date Jul 12, 2011
- Ebara Corporation
- Seiji Katsuoka
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing method and apparatus
- Patent number 7,959,977
- Issue date Jun 14, 2011
- Ebara Corporation
- Seiji Katsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate holding apparatus, substrate holding method, and substrat...
- Patent number 7,886,685
- Issue date Feb 15, 2011
- Ebara Corporation
- Masahiko Sekimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and apparatus
- Patent number 7,735,451
- Issue date Jun 15, 2010
- Ebara Corporation
- Seiji Katsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate holding apparatus
- Patent number 7,735,450
- Issue date Jun 15, 2010
- Ebara Corporation
- Seiji Katsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate polishing apparatus and method
- Patent number 7,585,205
- Issue date Sep 8, 2009
- Ebara Corporation
- Seiji Katsuoka
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,575,636
- Issue date Aug 18, 2009
- Ebara Corporation
- Seiji Katsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,442,257
- Issue date Oct 28, 2008
- Ebara Corporation
- Seiji Katsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing unit and substrate processing apparatus
- Patent number 7,368,016
- Issue date May 6, 2008
- Ebara Corporation
- Seiji Katsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,235,135
- Issue date Jun 26, 2007
- Ebara Corporation
- Mitsuru Miyazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,087,117
- Issue date Aug 8, 2006
- Ebara Corporation
- Seiji Katsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE HOLDING APPARATUS, SUBSTRATE HOLDING METHOD, AND SUBSTRAT...
- Publication number 20120141246
- Publication date Jun 7, 2012
- Masahiko Sekimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE POLISHING APPARATUS AND METHOD
- Publication number 20110237163
- Publication date Sep 29, 2011
- Seiji Katsuoka
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND APPARATUS
- Publication number 20110203518
- Publication date Aug 25, 2011
- Seiji Katsuoka
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SUBSTRATE HOLDING APPARATUS, SUBSTRATE HOLDING METHOD, AND SUBSTRAT...
- Publication number 20110094442
- Publication date Apr 28, 2011
- Masahiko Sekimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND APPARATUS
- Publication number 20100221432
- Publication date Sep 2, 2010
- Seiji Katsuoka
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SUBSTRATE POLISHING APPARATUS AND METHOD
- Publication number 20090291624
- Publication date Nov 26, 2009
- Seiji Katsuoka
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING UNIT, SUBSTRATE TRANSFER METHOD, SUBSTRATE CLE...
- Publication number 20090092469
- Publication date Apr 9, 2009
- EBARA CORPORATION
- Masahiko Sekimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing unit and substrate processing apparatus
- Publication number 20080178800
- Publication date Jul 31, 2008
- Seiji Katsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate polishing apparatus and method
- Publication number 20080085658
- Publication date Apr 10, 2008
- Seiji Katsuoka
- B24 - GRINDING POLISHING
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20070214620
- Publication date Sep 20, 2007
- Mitsuru Miyazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate holding apparatus, substrate holding method, and substrat...
- Publication number 20070070575
- Publication date Mar 29, 2007
- Masahiko Sekimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20060243205
- Publication date Nov 2, 2006
- Seiji Katsuoka
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20060243204
- Publication date Nov 2, 2006
- Seiji Katsuoka
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20060236929
- Publication date Oct 26, 2006
- Seiji Katsuoka
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Substrate processing unit and substrate processing apparatus
- Publication number 20050281947
- Publication date Dec 22, 2005
- Seiji Katsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20050158478
- Publication date Jul 21, 2005
- Seiji Katsuoka
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20050072358
- Publication date Apr 7, 2005
- Seiji Katsuoka
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Substrate processing method and apparatus
- Publication number 20040131766
- Publication date Jul 8, 2004
- Seiji Katsuoka
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20040040131
- Publication date Mar 4, 2004
- Mitsuru Miyazaki
- H01 - BASIC ELECTRIC ELEMENTS

Teruyuki Watanabe

Person

Patents Grantslast 30 patents

Substrate holding apparatus, substrate holding method, and substrat...

Substrate processing method and apparatus

Substrate holding apparatus, substrate holding method, and substrat...

Substrate polishing apparatus and method

Substrate processing method and apparatus

Substrate holding apparatus, substrate holding method, and substrat...

Substrate processing method and apparatus

Substrate holding apparatus

Substrate polishing apparatus and method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing unit and substrate processing apparatus

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Patents Applicationslast 30 patents

SUBSTRATE HOLDING APPARATUS, SUBSTRATE HOLDING METHOD, AND SUBSTRAT...

SUBSTRATE POLISHING APPARATUS AND METHOD

SUBSTRATE PROCESSING METHOD AND APPARATUS

SUBSTRATE HOLDING APPARATUS, SUBSTRATE HOLDING METHOD, AND SUBSTRAT...

SUBSTRATE PROCESSING METHOD AND APPARATUS

SUBSTRATE POLISHING APPARATUS AND METHOD

SUBSTRATE PROCESSING UNIT, SUBSTRATE TRANSFER METHOD, SUBSTRATE CLE...

Substrate processing unit and substrate processing apparatus

Substrate polishing apparatus and method

Substrate processing apparatus and substrate processing method

Substrate holding apparatus, substrate holding method, and substrat...

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing unit and substrate processing apparatus

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing method and apparatus

Substrate processing apparatus and substrate processing method