Tetsu Kawasaki

Person

Nirasaki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing semiconductor device, and resist coating an...
- Patent number 8,202,682
- Issue date Jun 19, 2012
- Tokyo Electron Limited
- Fumiko Iwao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate cleaning device and substrate cleaning method
- Patent number 8,037,890
- Issue date Oct 18, 2011
- Tokyo Electron Limited
- Taro Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming wiring of semiconductor device
- Patent number 7,485,568
- Issue date Feb 3, 2009
- Tokyo Electron Limited
- Satoru Shimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing system and polishing method
- Patent number 6,660,124
- Issue date Dec 9, 2003
- Tokyo Electron Ltd.
- Tetsu Kawasaki
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for processing substrate
- Patent number 6,238,511
- Issue date May 29, 2001
- Tokyo Electron Limited
- Tetsuya Sada
- B32 - LAYERED PRODUCTS
Information Patent Grant
Coating apparatus for semiconductor process
- Patent number 6,110,282
- Issue date Aug 29, 2000
- Tokyo Electron Limited
- Kiyohisa Tateyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for forming coating film for semiconductor processing
- Patent number 6,010,570
- Issue date Jan 4, 2000
- Tokyo Electron Limited
- Kimio Motoda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for treating a substrate with resist and resist-treating...
- Patent number 5,906,860
- Issue date May 25, 1999
- Tokyo Electron Limited
- Kimio Motoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for processing substrates
- Patent number 5,853,812
- Issue date Dec 29, 1998
- Tokyo Electron Limited
- Tetsu Kawasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD
- Publication number 20120006362
- Publication date Jan 12, 2012
- TOKYO ELECTRON LIMITED
- Taro Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RESIST COATING AN...
- Publication number 20090220892
- Publication date Sep 3, 2009
- TOKYO ELECTRON LIMITED
- Fumiko IWAO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE AND DEVELOPING METHOD
- Publication number 20080070167
- Publication date Mar 20, 2008
- TOKYO ELECTRON LIMITED
- Nobuhiro TAKAHASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Peeling-off method and reworking method of resist film
- Publication number 20070184379
- Publication date Aug 9, 2007
- TOKYO ELECTRON LIMITED
- Shigeo Ashigaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate cleaning device and substrate cleaning method
- Publication number 20070044823
- Publication date Mar 1, 2007
- TOKYO ELECTRON LIMITED
- Taro Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for forming wiring of semiconductor device
- Publication number 20050196953
- Publication date Sep 8, 2005
- TOKYO ELECTRON LIMITED
- Satoru Shimura
- H01 - BASIC ELECTRIC ELEMENTS

Tetsu Kawasaki

Person

Patents Grantslast 30 patents

Method of manufacturing semiconductor device, and resist coating an...

Substrate cleaning device and substrate cleaning method

Method for forming wiring of semiconductor device

Polishing system and polishing method

Method and apparatus for processing substrate

Coating apparatus for semiconductor process

Apparatus for forming coating film for semiconductor processing

Apparatus for treating a substrate with resist and resist-treating...

Method and apparatus for processing substrates

Patents Applicationslast 30 patents

SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RESIST COATING AN...

EXPOSURE AND DEVELOPING METHOD

Peeling-off method and reworking method of resist film

Substrate cleaning device and substrate cleaning method

Method for forming wiring of semiconductor device