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Tetsu TSUNAMOTO
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Kurokawa, JP
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Patents Grants
last 30 patents
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Patent Grant
Control method and plasma processing apparatus
Patent number
11,658,012
Issue date
May 23, 2023
Tokyo Electron Limited
Toshiyuki Arakane
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Discharging method and substrate processing apparatus
Patent number
11,462,431
Issue date
Oct 4, 2022
Tokyo Electron Limited
Toshiyuki Arakane
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Measurement method and measuring jig
Patent number
11,456,199
Issue date
Sep 27, 2022
Tokyo Electron Limited
Ryusei Kashimura
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Measuring device, measurement method, and plasma processing device
Patent number
10,720,313
Issue date
Jul 21, 2020
Tokyo Electron Limited
Masanori Sato
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
CONTROL METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20210183625
Publication date
Jun 17, 2021
TOKYO ELECTRON LIMITED
Toshiyuki ARAKANE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DISCHARGING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20200343124
Publication date
Oct 29, 2020
TOKYO ELECTRON LIMITED
Toshiyuki ARAKANE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MEASUREMENT METHOD AND MEASURING JIG
Publication number
20200211886
Publication date
Jul 2, 2020
TOKYO ELECTRON LIMITED
Ryusei KASHIMURA
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
MEASURING DEVICE, MEASUREMENT METHOD, AND PLASMA PROCESSING DEVICE
Publication number
20190066982
Publication date
Feb 28, 2019
TOKYO ELECTRON LIMITED
Masanori SATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ABNORMALITY DETECTING UNIT AND ABNORMALITY DETECTING METHOD
Publication number
20130056154
Publication date
Mar 7, 2013
TOKYO ELECTRON LIMITED
Michiko NAKAYA
H01 - BASIC ELECTRIC ELEMENTS