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Tetsu Zenko

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  • Nirasaki-shi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Film forming method and film forming apparatus
    • Patent number 11,970,767
    • Issue date Apr 30, 2024
    • Tokyo Electron Limited
    • Taichi Monden
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    FILM FORMING METHOD AND FILM FORMING APPARATUS
    • Publication number 20210047727
    • Publication date Feb 18, 2021
    • TOKYO ELECTRON LIMITED
    • Taichi MONDEN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Film-formation method for semiconductor process
    • Publication number 20050136657
    • Publication date Jun 23, 2005
    • TOKYO ELECTRON LIMITED
    • Hiroaki Yokoi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...