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Tetsuhiko Sanbei
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Narita, JP
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last 30 patents
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Patent Grant
Dry etching process for semiconductor
Patent number
5,522,966
Issue date
Jun 4, 1996
Nippondenso Co., Ltd.
Atsushi Komura
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Dry etching process for semiconductor
Patent number
5,423,941
Issue date
Jun 13, 1995
Nippondenso Co., Ltd.
Atsushi Komura
H01 - BASIC ELECTRIC ELEMENTS