Tetsuji Togawa

Person

Fujisawa-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate transporter and substrate processing apparatus including...
- Patent number 12,237,194
- Issue date Feb 25, 2025
- EBARA CORPORATION
- Akihiro Yazawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate polishing apparatus and polishing liquid discharge method...
- Patent number 12,138,734
- Issue date Nov 12, 2024
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate polishing apparatus and polishing liquid discharge method...
- Patent number 11,648,638
- Issue date May 16, 2023
- Ebara Corporation
- Tetsuji Togawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing method and polishing apparatus
- Patent number 11,618,123
- Issue date Apr 4, 2023
- EBARA CORPORATION
- Yu Ishii
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus of substrate
- Patent number 11,607,769
- Issue date Mar 21, 2023
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Method for polishing substrate including functional chip
- Patent number 11,597,051
- Issue date Mar 7, 2023
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for polishing a substrate
- Patent number 11,548,113
- Issue date Jan 10, 2023
- Ebara Corporation
- Makoto Fukushima
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing head and polishing apparatus
- Patent number 11,511,389
- Issue date Nov 29, 2022
- Ebara Corporation
- Kenichi Akazawa
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing head for face-up type polishing apparatus, polishing appa...
- Patent number 11,440,161
- Issue date Sep 13, 2022
- Ebara Corporation
- Kenichi Kobayashi
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus and substrate holding apparatus
- Patent number 11,373,894
- Issue date Jun 28, 2022
- Ebara Corporation
- Kenichi Kobayashi
- B08 - CLEANING
Information Patent Grant
Polishing apparatus
- Patent number 11,224,956
- Issue date Jan 18, 2022
- Ebara Corporation
- Osamu Nabeya
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 10,493,588
- Issue date Dec 3, 2019
- Ebara Corporation
- Masaya Seki
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus for detecting abnormality in polishing of a sub...
- Patent number 10,343,252
- Issue date Jul 9, 2019
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for polishing a substrate
- Patent number 10,307,882
- Issue date Jun 4, 2019
- Ebara Corporation
- Makoto Fukushima
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 10,293,455
- Issue date May 21, 2019
- Ebara Corporation
- Osamu Nabeya
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 10,155,294
- Issue date Dec 18, 2018
- Ebara Corporation
- Masaya Seki
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 10,040,166
- Issue date Aug 7, 2018
- Ebara Corporation
- Osamu Nabeya
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 9,914,196
- Issue date Mar 13, 2018
- Ebara Corporation
- Masaya Seki
- B24 - GRINDING POLISHING
Information Patent Grant
Method of polishing back surface of substrate and substrate process...
- Patent number 9,808,903
- Issue date Nov 7, 2017
- Ebara Corporation
- Yu Ishii
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus
- Patent number 9,808,836
- Issue date Nov 7, 2017
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for detecting abnormality in polishing of a substrate
- Patent number 9,782,869
- Issue date Oct 10, 2017
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 9,724,797
- Issue date Aug 8, 2017
- Ebara Corporation
- Osamu Nabeya
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method of polishing a substrate
- Patent number 9,694,467
- Issue date Jul 4, 2017
- Ebara Corporation
- Masaya Seki
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method involving a polishing member polishing at angle ta...
- Patent number 9,630,289
- Issue date Apr 25, 2017
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Wafer polishing apparatus
- Patent number 9,604,335
- Issue date Mar 28, 2017
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus
- Patent number 9,566,616
- Issue date Feb 14, 2017
- Ebara Corporation
- Tetsuji Togawa
- B08 - CLEANING
Information Patent Grant
Polishing apparatus
- Patent number 9,561,573
- Issue date Feb 7, 2017
- Ebara Corporation
- Masaya Seki
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 9,457,448
- Issue date Oct 4, 2016
- Ebara Corporation
- Masaya Seki
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 9,457,447
- Issue date Oct 4, 2016
- Ebara Corporation
- Masaya Seki
- B24 - GRINDING POLISHING
Information Patent Grant
Wafer polishing method
- Patent number 9,399,274
- Issue date Jul 26, 2016
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE POLISHING APPARATUS AND POLISHING LIQUID DISCHARGE METHOD...
- Publication number 20230302604
- Publication date Sep 28, 2023
- EBARA CORPORATION
- Tetsuji TOGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR POLISHING SUBSTRATE INCLUDING FUNCTIONAL CHIP
- Publication number 20230173636
- Publication date Jun 8, 2023
- EBARA CORPORATION
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE TRANSPORTER AND SUBSTRATE PROCESSING APPARATUS INCLUDING...
- Publication number 20220005716
- Publication date Jan 6, 2022
- EBARA CORPORATION
- Akihiro Yazawa
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
POLISHING METHOD AND POLISHING APPARATUS
- Publication number 20210170541
- Publication date Jun 10, 2021
- EBARA CORPORATION
- Yu Ishii
- B24 - GRINDING POLISHING
Information Patent Application
METHOD FOR POLISHING SUBSTRATE INCLUDING FUNCTIONAL CHIP
- Publication number 20200391341
- Publication date Dec 17, 2020
- EBARA CORPORATION
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE POLISHING APPARATUS AND METHOD FOR DISCHARGING POLISHING...
- Publication number 20200376625
- Publication date Dec 3, 2020
- EBARA CORPORATION
- Tetsuji TOGAWA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS OF SUBSTRATE
- Publication number 20200130131
- Publication date Apr 30, 2020
- EBARA CORPORATION
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING HEAD AND POLISHING APPARATUS
- Publication number 20200094371
- Publication date Mar 26, 2020
- EBARA CORPORATION
- Kenichi Akazawa
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE HOLDING APPARATUS
- Publication number 20190318954
- Publication date Oct 17, 2019
- EBARA CORPORATION
- Kenichi KOBAYASHI
- B08 - CLEANING
Information Patent Application
METHOD AND APPARATUS FOR POLISHING A SUBSTRATE
- Publication number 20190240801
- Publication date Aug 8, 2019
- EBARA CORPORATION
- Makoto FUKUSHIMA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS
- Publication number 20190224808
- Publication date Jul 25, 2019
- EBARA CORPORATION
- Osamu Nabeya
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING HEAD FOR FACE-UP TYPE POLISHING APPARATUS, POLISHING APPA...
- Publication number 20190210187
- Publication date Jul 11, 2019
- EBARA CORPORATION
- Kenichi KOBAYASHI
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20180169822
- Publication date Jun 21, 2018
- EBARA CORPORATION
- Masaya Seki
- B24 - GRINDING POLISHING
Information Patent Application
METHOD OF DETECTING ABNORMALITY IN POLISHING OF A SUBSTRATE AND POL...
- Publication number 20170312879
- Publication date Nov 2, 2017
- EBARA CORPORATION
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Application
CLEANING APPARATUS
- Publication number 20170200623
- Publication date Jul 13, 2017
- EBARA CORPORATION
- Suguru OZAWA
- B08 - CLEANING
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20170100813
- Publication date Apr 13, 2017
- EBARA CORPORATION
- Masaya SEKI
- B24 - GRINDING POLISHING
Information Patent Application
WAFER POLISHING APPARATUS
- Publication number 20160297048
- Publication date Oct 13, 2016
- EBARA CORPORATION
- Tetsuji TOGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING APPARATUS
- Publication number 20160250735
- Publication date Sep 1, 2016
- EBARA CORPORATION
- Osamu Nabeya
- B24 - GRINDING POLISHING
Information Patent Application
METHOD AND APPARATUS FOR POLISHING A SUBSTRATE
- Publication number 20160176011
- Publication date Jun 23, 2016
- EBARA CORPORATION
- Makoto FUKUSHIMA
- B24 - GRINDING POLISHING
Information Patent Application
METHOD OF DETECTING ABNORMALITY IN POLISHING OF A SUBSTRATE AND POL...
- Publication number 20160114455
- Publication date Apr 28, 2016
- EBARA CORPORATION
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20150298280
- Publication date Oct 22, 2015
- EBARA CORPORATION
- Masaya SEKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20150258653
- Publication date Sep 17, 2015
- EBARA CORPORATION
- Masaya Seki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20150151398
- Publication date Jun 4, 2015
- EBARA CORPORATION
- Masaya SEKI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20150104999
- Publication date Apr 16, 2015
- EBARA CORPORATION
- Masaya SEKI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150000055
- Publication date Jan 1, 2015
- EBARA CORPORATION
- Tetsuji TOGAWA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150000056
- Publication date Jan 1, 2015
- EBARA CORPORATION
- Tetsuji TOGAWA
- B08 - CLEANING
Information Patent Application
POLISHING APPARATUS
- Publication number 20140357164
- Publication date Dec 4, 2014
- Osamu NABEYA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS
- Publication number 20140329446
- Publication date Nov 6, 2014
- Osamu NABEYA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS
- Publication number 20140302754
- Publication date Oct 9, 2014
- Osamu NABEYA
- B24 - GRINDING POLISHING
Information Patent Application
METHOD OF POLISHING BACK SURFACE OF SUBSTRATE AND SUBSTRATE PROCESS...
- Publication number 20140220866
- Publication date Aug 7, 2014
- Yu ISHII
- B24 - GRINDING POLISHING

Tetsuji Togawa

Person

Patents Grantslast 30 patents

Substrate transporter and substrate processing apparatus including...

Substrate polishing apparatus and polishing liquid discharge method...

Substrate polishing apparatus and polishing liquid discharge method...

Polishing method and polishing apparatus

Polishing apparatus of substrate

Method for polishing substrate including functional chip

Method and apparatus for polishing a substrate

Polishing head and polishing apparatus

Polishing head for face-up type polishing apparatus, polishing appa...

Substrate processing apparatus and substrate holding apparatus

Polishing apparatus

Polishing apparatus and polishing method

Polishing apparatus for detecting abnormality in polishing of a sub...

Method and apparatus for polishing a substrate

Polishing apparatus

Polishing apparatus and polishing method

Polishing apparatus

Polishing apparatus and polishing method

Method of polishing back surface of substrate and substrate process...

Substrate processing apparatus

Apparatus for detecting abnormality in polishing of a substrate

Polishing apparatus

Polishing method of polishing a substrate

Polishing method involving a polishing member polishing at angle ta...

Wafer polishing apparatus

Substrate processing apparatus

Polishing apparatus

Polishing apparatus and polishing method

Polishing apparatus and polishing method

Wafer polishing method

Patents Applicationslast 30 patents

SUBSTRATE POLISHING APPARATUS AND POLISHING LIQUID DISCHARGE METHOD...

METHOD FOR POLISHING SUBSTRATE INCLUDING FUNCTIONAL CHIP

SUBSTRATE TRANSPORTER AND SUBSTRATE PROCESSING APPARATUS INCLUDING...

POLISHING METHOD AND POLISHING APPARATUS

METHOD FOR POLISHING SUBSTRATE INCLUDING FUNCTIONAL CHIP

SUBSTRATE POLISHING APPARATUS AND METHOD FOR DISCHARGING POLISHING...

POLISHING APPARATUS OF SUBSTRATE

POLISHING HEAD AND POLISHING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE HOLDING APPARATUS

METHOD AND APPARATUS FOR POLISHING A SUBSTRATE

POLISHING APPARATUS

POLISHING HEAD FOR FACE-UP TYPE POLISHING APPARATUS, POLISHING APPA...

POLISHING APPARATUS AND POLISHING METHOD

METHOD OF DETECTING ABNORMALITY IN POLISHING OF A SUBSTRATE AND POL...

CLEANING APPARATUS

POLISHING APPARATUS AND POLISHING METHOD

WAFER POLISHING APPARATUS

POLISHING APPARATUS

METHOD AND APPARATUS FOR POLISHING A SUBSTRATE

METHOD OF DETECTING ABNORMALITY IN POLISHING OF A SUBSTRATE AND POL...

POLISHING APPARATUS AND POLISHING METHOD

POLISHING APPARATUS AND POLISHING METHOD

POLISHING APPARATUS AND POLISHING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

POLISHING APPARATUS

POLISHING APPARATUS

POLISHING APPARATUS

METHOD OF POLISHING BACK SURFACE OF SUBSTRATE AND SUBSTRATE PROCESS...