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Tetsujiro Tada
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Akishima, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate polishing method and device
Patent number
8,814,635
Issue date
Aug 26, 2014
Sanshin Co., Ltd.
Nobukazu Hosokai
B24 - GRINDING POLISHING
Information
Patent Grant
Method of polishing a target surface
Patent number
7,927,187
Issue date
Apr 19, 2011
Nihon Micro Coating Co., Ltd.
Jun Watanabe
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus for and method of smoothing substrate surface
Patent number
6,908,369
Issue date
Jun 21, 2005
Nihon Microcoating Co., Ltd.
Tetsujiro Tada
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE POLISHING METHOD AND DEVICE
Publication number
20120045968
Publication date
Feb 23, 2012
NIHON MICRO COATING CO., LTD.
Nobukazu HOSOKAI
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING PAD AND METHOD OF POLISHING
Publication number
20080293332
Publication date
Nov 27, 2008
NIHON MICRO COATING CO., LTD.
Jun Watanabe
B24 - GRINDING POLISHING
Information
Patent Application
Apparatus for and method of smoothing substrate surface
Publication number
20040072504
Publication date
Apr 15, 2004
Nihon Microcoating Co., Ltd.
Tetsujiro Tada
B24 - GRINDING POLISHING