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Tetsuma YAGUCHI

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Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20240079215
    • Publication date Mar 7, 2024
    • TOKYO ELECTRON LIMITED
    • Tetsuma YAGUCHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20240030005
    • Publication date Jan 25, 2024
    • TOKYO ELECTRON LIMITED
    • Tetsuma YAGUCHI
    • H01 - BASIC ELECTRIC ELEMENTS