Tetsunori SASAYAMA

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Kikuchi-Gun, JP

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Patents Applicationslast 30 patents

Information Patent Application
CHAMBER PRESSURE CONTROL APPARATUS FOR NEAR ATMOSPHERIC EPITAXIAL G...
- Publication number 20150013604
- Publication date Jan 15, 2015
- Applied Materials, Inc.
- Toshiyuki NAKAGAWA
- C30 - CRYSTAL GROWTH