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Tetsuo Abe
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Kanagawa, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Testing apparatus using scanning electron microscope
Patent number
6,953,939
Issue date
Oct 11, 2005
Sony Corporation
Tetsuo Abe
G01 - MEASURING TESTING
Information
Patent Grant
Polysilicon evaluating method, polysilicon inspection apparatus and...
Patent number
6,933,185
Issue date
Aug 23, 2005
Sony Corporation
Hiroyuki Wada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for evaluating polysilicon film
Patent number
6,798,498
Issue date
Sep 28, 2004
Sony Corporation
Hiroyuki Wada
G01 - MEASURING TESTING
Information
Patent Grant
IC package inspection apparatus
Patent number
5,473,425
Issue date
Dec 5, 1995
Sony Corporation
Tomohide Tokumaru
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Inspection device using scanning electron microscope
Publication number
20040144928
Publication date
Jul 29, 2004
Tetsuo Abe
G01 - MEASURING TESTING
Information
Patent Application
Polysilicon evaluating method, polysilicon inspection apparatus and...
Publication number
20030183853
Publication date
Oct 2, 2003
Hiroyuki Wada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus for evaluating polysilicon film
Publication number
20020145733
Publication date
Oct 10, 2002
SONY CORPORATION
Hiroyuki Wada
G01 - MEASURING TESTING
Information
Patent Application
Polysilicon evaluating method, polysilicon inspection apparatus and...
Publication number
20010038105
Publication date
Nov 8, 2001
Hiroyuki Wada
H01 - BASIC ELECTRIC ELEMENTS