Tetsuo Fukuoka

Person

Koshi-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Resist pattern forming method, coating and developing apparatus and...
- Patent number 10,459,339
- Issue date Oct 29, 2019
- Tokyo Electron Limited
- Tetsuo Fukuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,340,140
- Issue date Jul 2, 2019
- Tokyo Electron Limited
- Tetsuo Fukuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating device, coating and developing system, heating method and s...
- Patent number 8,933,376
- Issue date Jan 13, 2015
- Tokyo Electron Limited
- Tetsuo Fukuoka
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Hydrophobicizing apparatus, hydrophobicizing method and storage medium
- Patent number 8,430,967
- Issue date Apr 30, 2013
- Tokyo Electron Limited
- Satoshi Shimmura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing system, system inspecting method, system inspe...
- Patent number 8,326,559
- Issue date Dec 4, 2012
- Tokyo Electron Limited
- Tetsuo Fukuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adhesion promoting process, adhesion promoting device, coating and...
- Patent number 8,304,020
- Issue date Nov 6, 2012
- Tokyo Electron Limited
- Tetsuo Fukuoka
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Apparatus and method for heating substrate and coating and developi...
- Patent number 8,237,092
- Issue date Aug 7, 2012
- Tokyo Electron Limited
- Shinichi Hayashi
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Heating apparatus and heating method
- Patent number 8,217,313
- Issue date Jul 10, 2012
- Tokyo Electron Limited
- Tetsuo Fukuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for heating substrate and coating and developi...
- Patent number 8,080,765
- Issue date Dec 20, 2011
- Tokyo Electron Limited
- Shinichi Hayashi
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Heating apparatus, coating and development apparatus, and heating m...
- Patent number 8,025,925
- Issue date Sep 27, 2011
- Tokyo Electron Limited
- Tetsuo Fukuoka
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Temperature measuring device using oscillating frequency signals
- Patent number 7,977,609
- Issue date Jul 12, 2011
- Tokyo Electron Limited
- Nobuyuki Sata
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Heat treatment device
- Patent number 7,871,265
- Issue date Jan 18, 2011
- Tokyo Electron Limited
- Tetsuo Fukuoka
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Apparatus and method for heating substrate and coating and developi...
- Patent number 7,812,285
- Issue date Oct 12, 2010
- Tokyo Electron Limited
- Shinichi Hayashi
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Heating apparatus, and coating and developing apparatus
- Patent number 7,797,855
- Issue date Sep 21, 2010
- Tokyo Electron Limited
- Tetsuo Fukuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat processing apparatus
- Patent number 6,744,020
- Issue date Jun 1, 2004
- Tokyo Electron Limited
- Eiichi Shirakawa
- F28 - HEAT EXCHANGE IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
GETTERING LAYER FORMING APPARATUS, GETTERING LAYER FORMING METHOD A...
- Publication number 20200185232
- Publication date Jun 11, 2020
- TOKYO ELECTRON LIMITED
- Tetsuo FUKUOKA
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20180182612
- Publication date Jun 28, 2018
- TOKYO ELECTRON LIMITED
- Tetsuo Fukuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RESIST PATTERN FORMING METHOD, COATING AND DEVELOPING APPARATUS AND...
- Publication number 20160085154
- Publication date Mar 24, 2016
- TOKYO ELECTRON LIMITED
- Tetsuo FUKUOKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
VAPORIZING APPARATUS, SUBSTRATE PROCESSING APPARATUS, COATING AND D...
- Publication number 20120034369
- Publication date Feb 9, 2012
- TOKYO ELECTRON LIMITED
- Kazuhiko ITO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HYDROPHOBICIZING APPARATUS, HYDROPHOBICIZING METHOD AND STORAGE MEDIUM
- Publication number 20110045166
- Publication date Feb 24, 2011
- TOKYO ELECTRON LIMITED
- Satoshi Shimmura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR HEATING SUBSTRATE AND COATING AND DEVELOPI...
- Publication number 20100330815
- Publication date Dec 30, 2010
- TOKYO ELECTRON LIMITED
- Shinichi Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR HEATING SUBSTRATE AND COATING AND DEVELOPI...
- Publication number 20100326351
- Publication date Dec 30, 2010
- TOKYO ELECTRON LIMITED
- Shinichi Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, DEVICE INSPECTING METHOD, DEVICE IN...
- Publication number 20090292491
- Publication date Nov 26, 2009
- TOKYO ELECTRON LIMITED
- Tetsuo Fukuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADHESION PROMOTING PROCESS, ADHESION PROMOTING DEVICE, COATING AND...
- Publication number 20090207390
- Publication date Aug 20, 2009
- TOKYO ELECTRON LIMITED
- Tetsuo FUKUOKA
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
HEATING APPARATUS AND HEATING METHOD
- Publication number 20080185370
- Publication date Aug 7, 2008
- TOKYO ELECTRON LIMITED
- Tetsuo Fukuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HEATING DEVICE, HEATING METHOD AND STORAGE MEDIUM
- Publication number 20080182217
- Publication date Jul 31, 2008
- TOKYO ELECTRON LIMITED
- Tetsuo Fukuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING DEVICE, COATING AND DEVELOPING SYSTEM, HEATING METHOD AND S...
- Publication number 20080169279
- Publication date Jul 17, 2008
- TOKYO ELECTRON LIMITED
- Tetsuo Fukuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heat treatment device
- Publication number 20080135207
- Publication date Jun 12, 2008
- TOKYO ELECTRON LIMITED
- Tetsuo Fukuoka
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
Hot plate and process for producing the same
- Publication number 20080011737
- Publication date Jan 17, 2008
- TOKYO ELECTRON LIMITED
- Tetsuo Fukuoka
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Temperature measuring device, thermal processor having temperature...
- Publication number 20070170170
- Publication date Jul 26, 2007
- Noboyuki Sata
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Heating apparatus, and coating and developing apparatus
- Publication number 20070048979
- Publication date Mar 1, 2007
- TOKYO ELECTRON LIMITED
- Tetsuo Fukuoka
- C30 - CRYSTAL GROWTH
Information Patent Application
Apparatus and method for heating substrate and coating and developi...
- Publication number 20060234178
- Publication date Oct 19, 2006
- TOKYO ELECTRON LIMITED
- Shinichi Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heating apparatus, coating and development apparatus, and heating m...
- Publication number 20060216665
- Publication date Sep 28, 2006
- TOKYO ELECTRON LIMITED
- Tetsuo Fukuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heat Processing apparatus
- Publication number 20020086259
- Publication date Jul 4, 2002
- TOKYO ELECTRON LIMITED
- Eiichi Shirakawa
- F28 - HEAT EXCHANGE IN GENERAL

Tetsuo Fukuoka

Person

Patents Grantslast 30 patents

Resist pattern forming method, coating and developing apparatus and...

Substrate processing apparatus and substrate processing method

Heating device, coating and developing system, heating method and s...

Hydrophobicizing apparatus, hydrophobicizing method and storage medium

Substrate processing system, system inspecting method, system inspe...

Adhesion promoting process, adhesion promoting device, coating and...

Apparatus and method for heating substrate and coating and developi...

Heating apparatus and heating method

Apparatus and method for heating substrate and coating and developi...

Heating apparatus, coating and development apparatus, and heating m...

Temperature measuring device using oscillating frequency signals

Heat treatment device

Apparatus and method for heating substrate and coating and developi...

Heating apparatus, and coating and developing apparatus

Heat processing apparatus

Patents Applicationslast 30 patents

GETTERING LAYER FORMING APPARATUS, GETTERING LAYER FORMING METHOD A...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

RESIST PATTERN FORMING METHOD, COATING AND DEVELOPING APPARATUS AND...

VAPORIZING APPARATUS, SUBSTRATE PROCESSING APPARATUS, COATING AND D...

HYDROPHOBICIZING APPARATUS, HYDROPHOBICIZING METHOD AND STORAGE MEDIUM

APPARATUS AND METHOD FOR HEATING SUBSTRATE AND COATING AND DEVELOPI...

APPARATUS AND METHOD FOR HEATING SUBSTRATE AND COATING AND DEVELOPI...

SUBSTRATE PROCESSING APPARATUS, DEVICE INSPECTING METHOD, DEVICE IN...

ADHESION PROMOTING PROCESS, ADHESION PROMOTING DEVICE, COATING AND...

HEATING APPARATUS AND HEATING METHOD

HEATING DEVICE, HEATING METHOD AND STORAGE MEDIUM

HEATING DEVICE, COATING AND DEVELOPING SYSTEM, HEATING METHOD AND S...

Heat treatment device

Hot plate and process for producing the same

Temperature measuring device, thermal processor having temperature...

Heating apparatus, and coating and developing apparatus

Apparatus and method for heating substrate and coating and developi...

Heating apparatus, coating and development apparatus, and heating m...

Heat Processing apparatus