Tetsuo ITO

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 11,342,201
- Issue date May 24, 2022
- SCREEN Holdings Co., Ltd.
- Tetsuo Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing device and substrate processing method
- Patent number 11,315,820
- Issue date Apr 26, 2022
- SCREEN Holdings Co., Ltd.
- Tetsuo Ito
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200312679
- Publication date Oct 1, 2020
- SCREEN Holdings Co., Ltd.
- Tetsuo ITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING DEVICE, SUBSTRATE PROCESSING METHOD, AND SEMIC...
- Publication number 20200312697
- Publication date Oct 1, 2020
- SCREEN Holdings Co., Ltd.
- Tetsuo ITO
- H01 - BASIC ELECTRIC ELEMENTS