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Tetsuo Kitabayashi
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Chigasaki, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Electrostatic chuck
Patent number
7,450,365
Issue date
Nov 11, 2008
Toto Ltd.
Jun Miyaji
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Electrostatic chuck
Patent number
7,248,457
Issue date
Jul 24, 2007
Toto Ltd.
Jun Miyaji
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Electrostatic chuck for an electrically insulative substrate, and a...
Patent number
7,209,339
Issue date
Apr 24, 2007
ULVAC, Inc.
Tetsuo Kitabayashi
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Electrostatic chuck and processing apparatus for insulative substrate
Patent number
6,768,627
Issue date
Jul 27, 2004
Toto Ltd.
Tetsuo Kitabayashi
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Electrostastic chuck
Patent number
5,530,616
Issue date
Jun 25, 1996
Toto Ltd.
Tetsuo Kitabayashi
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Electrostatic chuck
Patent number
5,384,682
Issue date
Jan 24, 1995
Toto Ltd.
Toshiya Watanabe
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Electrostatic chuck
Patent number
5,384,681
Issue date
Jan 24, 1995
Toto Ltd.
Tetsuo Kitabayashi
C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information
Patent Grant
Electrostatic chuck
Patent number
5,151,845
Issue date
Sep 29, 1992
Toto Ltd.
Toshiya Watanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of and apparatus for applying voltage to electrostatic chuck
Patent number
5,117,121
Issue date
May 26, 1992
Toto Ltd.
Toshiya Watanabe
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Dielectric ceramics for electrostatic chucks and method of making them
Patent number
5,104,834
Issue date
Apr 14, 1992
Tot Ltd.
Toshiya Watanabe
C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Patents Applications
last 30 patents
Information
Patent Application
Electrostatic chuck
Publication number
20070258187
Publication date
Nov 8, 2007
TOTO LTD.
Jun Miyaji
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
Electrostatic chuck
Publication number
20070109713
Publication date
May 17, 2007
TOTO LTD.
Jun Miyaji
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
Method for attracting glass substrate with electrostatic chuck and...
Publication number
20060158822
Publication date
Jul 20, 2006
TOTO LTD.
Shunpei Kondo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electrostatic chuck for an electrically insulative substrate, and a...
Publication number
20040218340
Publication date
Nov 4, 2004
Toto, Ltd.
Tetsuo Kitabayashi
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR