Tetsuo Shimizu

Person

Miyanohigashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Flow rate control device, diagnostic device for use in flow rate me...
- Patent number 8,789,556
- Issue date Jul 29, 2014
- Horiba Stec, Co., Ltd.
- Tadahiro Yasuda
- G05 - CONTROLLING REGULATING
Information Patent Grant
Thermal type mass flow meter, and thermal type mass flow control de...
- Patent number 8,219,329
- Issue date Jul 10, 2012
- Horiba Stec, Co., Ltd.
- Hiroyuki Ebi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Semiconductor fabrication system, and flow rate correction method a...
- Patent number 7,682,843
- Issue date Mar 23, 2010
- Tokyo Electron Limited
- Shuji Moriya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid material evaporation apparatus for semiconductor manufacturing
- Patent number 7,115,186
- Issue date Oct 3, 2006
- Stec Inc.
- Hideaki Miyamoto
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Liquid material supply system and method for semiconductor manufact...
- Patent number 6,933,233
- Issue date Aug 23, 2005
- STEC, Inc.
- Makoto Yonebayashi
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Method for vaporizing and supplying organometal compounds
- Patent number 5,377,616
- Issue date Jan 3, 1995
- Stec, Inc.
- Hiroshi Mihira
- C30 - CRYSTAL GROWTH
Information Patent Grant
Apparatus for vaporizing and supplying organometal compounds
- Patent number 5,160,542
- Issue date Nov 3, 1992
- STEC Inc.
- Hiroshi Mihira
- C30 - CRYSTAL GROWTH
Information Patent Grant
Flow rate control valve
- Patent number 5,158,263
- Issue date Oct 27, 1992
- Stec, Inc.
- Tetsuo Shimizu
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Control valve
- Patent number 5,094,430
- Issue date Mar 10, 1992
- Stec, Inc.
- Takashi Shirai
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Fluid control device
- Patent number 4,695,034
- Issue date Sep 22, 1987
- STEC Inc.
- Tetsuo Shimizu
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Thermopile type detector with temperature sensor for cold junction
- Patent number 4,456,919
- Issue date Jun 26, 1984
- Horiba, Ltd.
- Katsuhiko Tomita
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
CONTINUOUS REACTION APPARATUS AND METHOD OF CONTINUOUS POLYMERIZATI...
- Publication number 20170022300
- Publication date Jan 26, 2017
- Horiba Stec, Co., Ltd.
- Kazuhiro HIRAHARA
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
FLOW RATE CONTROL DEVICE, DIAGNOSTIC DEVICE FOR USE IN FLOW RATE ME...
- Publication number 20130092257
- Publication date Apr 18, 2013
- HORIBA STEC, CO., LTD.
- Tadahiro Yasuda
- G01 - MEASURING TESTING
Information Patent Application
FLOW RATE CONTROL DEVICE, AND DIAGNOSTIC DEVICE AND RECORDING MEDIU...
- Publication number 20130092258
- Publication date Apr 18, 2013
- HORIBA STEC, CO., LTD.
- Tadahiro Yasuda
- G01 - MEASURING TESTING
Information Patent Application
FLOW RATE CONTROL DEVICE, DIAGNOSTIC DEVICE FOR USE IN FLOW RATE ME...
- Publication number 20130092256
- Publication date Apr 18, 2013
- HORIBA STEC, CO., LTD.
- Tadahiro Yasuda
- G01 - MEASURING TESTING
Information Patent Application
THERMAL TYPE MASS FLOW METER, AND THERMAL TYPE MASS FLOW CONTROL DE...
- Publication number 20110125445
- Publication date May 26, 2011
- Hiroyuki Ebi
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD FOR FORMING FILM AND FILM FORMING SYSTEM
- Publication number 20090092741
- Publication date Apr 9, 2009
- Kozo Ishida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR FABRICATION SYSTEM, AND FLOW RATE CORRECTION METHOD A...
- Publication number 20090061541
- Publication date Mar 5, 2009
- TOKYO ELECTRON LIMITED
- Shuji Moriya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING SYSTEM AND METHOD FOR FORMING FILM
- Publication number 20080095936
- Publication date Apr 24, 2008
- Jiro Senda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Liquid material evaporation supply apparatus
- Publication number 20030217697
- Publication date Nov 27, 2003
- Hideaki Miyamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Liquid material supply system and method for semiconductor manufact...
- Publication number 20030209143
- Publication date Nov 13, 2003
- Makoto Yonebayashi
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Liquid material evaporation apparatus for semiconductor manufacturing
- Publication number 20030196763
- Publication date Oct 23, 2003
- Hideaki Miyamoto
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL

Tetsuo Shimizu

Person

Patents Grantslast 30 patents

Flow rate control device, diagnostic device for use in flow rate me...

Thermal type mass flow meter, and thermal type mass flow control de...

Semiconductor fabrication system, and flow rate correction method a...

Liquid material evaporation apparatus for semiconductor manufacturing

Liquid material supply system and method for semiconductor manufact...

Method for vaporizing and supplying organometal compounds

Apparatus for vaporizing and supplying organometal compounds

Flow rate control valve

Control valve

Fluid control device

Thermopile type detector with temperature sensor for cold junction

Patents Applicationslast 30 patents

CONTINUOUS REACTION APPARATUS AND METHOD OF CONTINUOUS POLYMERIZATI...

FLOW RATE CONTROL DEVICE, DIAGNOSTIC DEVICE FOR USE IN FLOW RATE ME...

FLOW RATE CONTROL DEVICE, AND DIAGNOSTIC DEVICE AND RECORDING MEDIU...

FLOW RATE CONTROL DEVICE, DIAGNOSTIC DEVICE FOR USE IN FLOW RATE ME...

THERMAL TYPE MASS FLOW METER, AND THERMAL TYPE MASS FLOW CONTROL DE...

METHOD FOR FORMING FILM AND FILM FORMING SYSTEM

SEMICONDUCTOR FABRICATION SYSTEM, AND FLOW RATE CORRECTION METHOD A...

FILM FORMING SYSTEM AND METHOD FOR FORMING FILM

Liquid material evaporation supply apparatus

Liquid material supply system and method for semiconductor manufact...

Liquid material evaporation apparatus for semiconductor manufacturing