Tetsuo Yuasa

Person

  • Akishima, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Electron beam exposure method

    • Patent number 4,151,422
    • Issue date Apr 24, 1979
    • Rikagaku Kenkyusho
    • Eiichi Goto
    • H01 - BASIC ELECTRIC ELEMENTS