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Tetsuro Iwashita
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method of polishing a silicon wafer
Patent number
8,877,643
Issue date
Nov 4, 2014
Sumco Corporation
Shuhei Matsuda
B24 - GRINDING POLISHING
Information
Patent Grant
Silicon epitaxial wafer and method for production thereof
Patent number
8,815,710
Issue date
Aug 26, 2014
Sumco Corporation
Masayuki Ishibashi
C30 - CRYSTAL GROWTH
Information
Patent Grant
Method of manufacturing semiconductor substrate and method of evalu...
Patent number
7,479,204
Issue date
Jan 20, 2009
Sumco Corporation
Morimasa Miyazaki
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
METHOD OF POLISHING SILICON WAFER AS WELL AS SILICON WAFER
Publication number
20120080775
Publication date
Apr 5, 2012
Shuhei Matsuda
B24 - GRINDING POLISHING
Information
Patent Application
SILICON EPITAXIAL WAFER AND METHOD FOR PRODUCTION THEREOF
Publication number
20110031592
Publication date
Feb 10, 2011
SUMCO CORPORATION
Masayuki Ishibashi
C30 - CRYSTAL GROWTH
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR SUBSTRATE AND METHOD OF EVALU...
Publication number
20070193686
Publication date
Aug 23, 2007
SUMCO CORPORATION
Morimasa MIYAZAKI
G01 - MEASURING TESTING