TREA

Tetsuro Nakahara

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  • Mashiki, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 10,593,571
    • Issue date Mar 17, 2020
    • Tokyo Electron Limited
    • Hiroaki Inadomi
    • B08 - CLEANING
  • Information Patent Grant

    Liquid coating system
    • Patent number 5,374,312
    • Issue date Dec 20, 1994
    • Tokyo Electron Limited
    • Keizo Hasebe
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20170287742
    • Publication date Oct 5, 2017
    • TOKYO ELECTRON LIMITED
    • Hiroaki Inadomi
    • B08 - CLEANING