Tetsuro Ogata

Follow

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Magnetic field control for uniform film thickness distribution in s...
- Patent number 8,778,145
- Issue date Jul 15, 2014
- Canon Anelva Corporation
- Eisaku Watanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing semiconductor memory element and sputterin...
- Patent number 8,278,212
- Issue date Oct 2, 2012
- Canon Anelva Corporation
- Eisaku Watanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR MEMORY ELEMENT AND SPUTTERIN...
- Publication number 20110312178
- Publication date Dec 22, 2011
- Canon ANELVA Corporation
- Eisaku Watanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETIC FIELD CONTROL FOR UNIFORM FILM THICKNESS DISTRIBUTION IN S...
- Publication number 20110259733
- Publication date Oct 27, 2011
- Canon ANELVA Corporation
- Eisaku Watanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...