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Tetsuro Shirasaka
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Koshi City, Kumamoto, JP
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last 30 patents
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Patent Grant
Substrate processing apparatus, substrate processing method and rec...
Patent number
11,905,597
Issue date
Feb 20, 2024
Tokyo Electron Limited
Tetsuro Shirasaka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE PROCESSING METHOD
Publication number
20240141501
Publication date
May 2, 2024
TOKYO ELECTRON LIMITED
Tetsuro Shirasaka
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
Publication number
20220145468
Publication date
May 12, 2022
TOKYO ELECTRON LIMITED
Tetsuro Shirasaka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...