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Vacuum evacuation system
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Patent number 10,978,315
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Issue date Apr 13, 2021
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Ebara Corporation
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Atsushi Shiokawa
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G05 - CONTROLLING REGULATING
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Vacuum pump with abatement function
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Patent number 10,632,419
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Issue date Apr 28, 2020
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Ebara Corporation
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Toshiharu Nakazawa
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B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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Vacuum pump with abatement function
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Patent number 10,143,964
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Issue date Dec 4, 2018
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Ebara Corporation
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Kohtaro Kawamura
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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Vacuum pump with abatement function
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Patent number 9,956,524
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Issue date May 1, 2018
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Ebara Corporation
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Toshiharu Nakazawa
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B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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Vacuum pump with abatement function
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Patent number 9,822,974
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Issue date Nov 21, 2017
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Ebara Corporation
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Kohtaro Kawamura
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B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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Exhaust gas abatement apparatus
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Patent number 9,364,786
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Issue date Jun 14, 2016
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Ebara Corporation
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Kohtaro Kawamura
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Combined bearing and rotary machine
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Patent number 8,439,569
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Issue date May 14, 2013
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Ebara Corporation
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Kazuma Ito
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F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
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Unit bearing
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Patent number D660890
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Issue date May 29, 2012
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Ebara Corporation
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Kazuma Ito
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D15 - Machines not elsewhere specified
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Evacuation system
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Patent number 6,332,925
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Issue date Dec 25, 2001
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Ebara Corporation
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Nobuharu Noji
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Trapping device
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Patent number 6,158,226
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Issue date Dec 12, 2000
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Ebara Corporation
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Nobuharu Noji
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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