Tetsuro Yoshida

Person

  • Sendai-shi, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Ultra high-speed wet etching apparatus

    • Patent number 8,728,338
    • Issue date May 20, 2014
    • National University Corporation Tohoku University
    • Tadahiro Ohmi
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents