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Tetsuro Yoshida
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Sendai-shi, JP
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last 30 patents
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Patent Grant
Ultra high-speed wet etching apparatus
Patent number
8,728,338
Issue date
May 20, 2014
National University Corporation Tohoku University
Tadahiro Ohmi
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
ULTRA HIGH-SPEED WET ETCHING APPARATUS
Publication number
20130244442
Publication date
Sep 19, 2013
Tadahiro Ohmi
H01 - BASIC ELECTRIC ELEMENTS