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Tetsurou Taniguchi
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Tokyo, JP
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last 30 patents
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Patent Grant
Wafer polishing method
Patent number
8,900,033
Issue date
Dec 2, 2014
Sumco Corporation
Kazushige Takaishi
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
APPARATUS AND METHOD FOR DOUBLE-SIDE POLISHING WORKPIECE
Publication number
20210205949
Publication date
Jul 8, 2021
SUMCO CORPORATION
Mami KUBOTA
B24 - GRINDING POLISHING
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Patent Application
WAFER POLISHING METHOD
Publication number
20130017763
Publication date
Jan 17, 2013
Kazushige Takaishi
H01 - BASIC ELECTRIC ELEMENTS