Tetsushi Matsuda

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Aichi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Dielectric layer for electrostatic chuck and electrostatic chuck
- Patent number 9,120,704
- Issue date Sep 1, 2015
- Nippon Tungsten Co., Ltd.
- Kouta Tsutsumi
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES

Patents Applicationslast 30 patents

Information Patent Application
DIELECTRIC LAYER FOR ELECTROSTATIC CHUCK AND ELECTROSTATIC CHUCK
- Publication number 20140103612
- Publication date Apr 17, 2014
- NIPPON TUNGSTEN CO., LTD.
- Kouta Tsutsumi
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES