Tetsushi Ozaki

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Kai-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for autonomous identification of particle cont...
- Patent number 10,133,265
- Issue date Nov 20, 2018
- Tokyo Electron Limited
- Aaron Archer Waterman
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and apparatus for autonomous identification of particle cont...
- Patent number 9,405,289
- Issue date Aug 2, 2016
- Tokyo Electron Limited
- Aaron Archer Waterman
- G05 - CONTROLLING REGULATING
Information Patent Grant
Semiconductor device and method of manufacturing the same
- Patent number 8,129,775
- Issue date Mar 6, 2012
- Tokyo Electron Limited
- Koji Akiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film formation apparatus and method of using the same
- Patent number 7,615,163
- Issue date Nov 10, 2009
- Tokyo Electron Limited
- Akitake Tamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR AUTONOMOUS IDENTIFICATION OF PARTICLE CONT...
- Publication number 20160334782
- Publication date Nov 17, 2016
- TOKYO ELECTRON LIMITED
- Aaron Archer Waterman
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Substrate Processing Apparatus
- Publication number 20150275359
- Publication date Oct 1, 2015
- TOKYO ELECTRON LIMITED
- Kohei FUKUSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD OF FORMING SILICON NITRIDE FILM
- Publication number 20150243492
- Publication date Aug 27, 2015
- TOKYO ELECTRON LIMITED
- Tetsushi OZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR AUTONOMOUS IDENTIFICATION OF PARTICLE CONT...
- Publication number 20140163712
- Publication date Jun 12, 2014
- TOKYO ELECTRON LIMITED
- Aaron Archer Waterman
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20100148241
- Publication date Jun 17, 2010
- TOKYO ELECTRON LIMITED
- Koji AKIYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Film formation apparatus and method of using the same
- Publication number 20060137709
- Publication date Jun 29, 2006
- Akitake Tamura
- B08 - CLEANING