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Tetsutoshi Awamura
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Kumamoto, JP
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last 30 patents
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Patent Grant
Substrate processing device, substrate processing method, and devel...
Patent number
7,387,455
Issue date
Jun 17, 2008
Tokyo Electron Limited
Tetsutoshi Awamura
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Substrate processing device, substrate processing method, and devel...
Publication number
20050223980
Publication date
Oct 13, 2005
TOKYO ELECTRON LIMITED
Tetsutoshi Awamura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY