Tetsuya EMOTO

Person

Kyoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,910,213
- Issue date Feb 2, 2021
- SCREEN Holdings Co., Ltd.
- Tetsuya Emoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,843,223
- Issue date Nov 24, 2020
- SCREEN Holdings Co., Ltd.
- Takayoshi Tanaka
- B08 - CLEANING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,790,166
- Issue date Sep 29, 2020
- SCREEN Holdings Co., Ltd.
- Tetsuya Emoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing device
- Patent number 10,720,320
- Issue date Jul 21, 2020
- SCREEN Holdings Co., Ltd.
- Tetsuya Emoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method
- Patent number 10,510,528
- Issue date Dec 17, 2019
- SCREEN Holdings Co., Ltd.
- Tetsuya Emoto
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,224,198
- Issue date Mar 5, 2019
- SCREEN Holdings Co., Ltd.
- Tetsuya Emoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method
- Patent number 9,455,134
- Issue date Sep 27, 2016
- SCREEN Holdings Co., Ltd.
- Masahiro Kimura
- B08 - CLEANING
Information Patent Grant
Substrate treatment method and substrate treatment apparatus
- Patent number 9,259,758
- Issue date Feb 16, 2016
- SCREEN Holdings Co., Ltd.
- Tetsuya Emoto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing method
- Patent number 9,005,703
- Issue date Apr 14, 2015
- SCREEN Holdings Co., Ltd.
- Masahiro Kimura
- B08 - CLEANING
Information Patent Grant
Substrate processing method
- Patent number 8,821,974
- Issue date Sep 2, 2014
- Dainippon Screen Mfg. Co., Ltd.
- Masahiro Kimura
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20230290631
- Publication date Sep 14, 2023
- SCREEN Holdings Co., Ltd.
- Tetsuya EMOTO
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20190148134
- Publication date May 16, 2019
- SCREEN Holdings Co., Ltd.
- Tetsuya EMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180345315
- Publication date Dec 6, 2018
- SCREEN Holdings Co., Ltd.
- Takayoshi TANAKA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE
- Publication number 20180269056
- Publication date Sep 20, 2018
- SCREEN Holdings Co., Ltd.
- Tetsuya EMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180247837
- Publication date Aug 30, 2018
- SCREEN Holdings Co., Ltd.
- Tetsuya EMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20170182515
- Publication date Jun 29, 2017
- SCREEN Holdings Co., Ltd.
- Tetsuya EMOTO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20160372320
- Publication date Dec 22, 2016
- SCREEN Holdings Co., Ltd.
- Tetsuya EMOTO
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20150179431
- Publication date Jun 25, 2015
- SCREEN Holdings Co., Ltd.
- Masahiro KIMURA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20140283882
- Publication date Sep 25, 2014
- Dainippon Screen Mfg. Co., Ltd.
- Masahiro KIMURA
- B08 - CLEANING
Information Patent Application
SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS
- Publication number 20140065295
- Publication date Mar 6, 2014
- DAINIPPON SCREEN MFG. CO., LTD.
- Tetsuya EMOTO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20120045581
- Publication date Feb 23, 2012
- Masahiro KIMURA
- B08 - CLEANING

Tetsuya EMOTO

Person

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Substrate processing method and substrate processing apparatus

Substrate processing method and substrate processing apparatus

Substrate processing method and substrate processing device

Substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing method

Substrate treatment method and substrate treatment apparatus

Substrate processing method

Substrate processing method

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD

SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS